Light Blocking Electrical Interconnect
First Claim
Patent Images
1. A device comprising:
- a circuitry layer;
a movable member;
a conductive layer between the circuitry and the movable member;
a conductive plate between the movable member and the conductive layer;
a first charge transmitting flexure extending from the conductive layer to the movable member; and
a second charge transmitting flexure extending from the 11 conductive layer to the movable member.
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Abstract
An electrical interconnect to block light for use with an array of micro electromechanical machines separated by the first breaks includes a layer of an electrically conductive and an electrically isolated portions separated by second breaks configured to cross the first breaks on multiple sides of one of the micro electromechanical machines.
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Citations
24 Claims
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1. A device comprising:
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a circuitry layer;
a movable member;
a conductive layer between the circuitry and the movable member;
a conductive plate between the movable member and the conductive layer;
a first charge transmitting flexure extending from the conductive layer to the movable member; and
a second charge transmitting flexure extending from the 11 conductive layer to the movable member. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13)
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14. A light modulator comprising:
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a pixel plate;
a circuitry layer;
a conductive plate between the circuitry layer and the pixel plate; and
means spanning the pixel plate for transmitting electrical charge from the circuit layer to the pixel plate.
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15. A method of actuating a light modulator, the method comprising:
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charging a conductive plate spanning pixel plates on a first side of the conductive plate from a periphery of the conductive plate; and
charging the pixel plates to distinct voltages via distinct electrical isolated portions of a conductive electrical interconnect layer on a second side of the conductive plate.
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16. A method of transmitting charge to micro electromechanical machine devices that are separated by first breaks and of blocking light passing through the first breaks to control circuitry, the method comprising:
transmitting electrical charge to the micro electromechanical machines via a layer of electrically conductive and electrically isolated portions extending between micro electromechanical machines and the circuitry layer, wherein the portions are separated by second breaks configured to cross the first breaks on multiple sides of the micro electromechanical machines.
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17. A method of fabricating an electronic device having an array of micro electromechanical machines having boundaries, the method comprising:
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forming a circuitry layer;
forming an electrically conductive electrical interconnect layer having electrically conductive and electrically isolated portions electrically connected to the circuitry layer and separated by breaks configured to cross the boundaries of one of the micro electromechanical machines on multiple sides of the micro electromechanical machine. - View Dependent Claims (18)
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19. An electrical interconnect to block light for use with an array of micro electromechanical machines separated by first breaks, the interconnect comprising:
a layer of electrically conductive and electrically isolated portions separated by second breaks configured to cross the first breaks on multiple sides of one of the micro electromechanical machines.
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20. An electrical device, comprising:
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a MEMs structure;
electrical circuitry disposed under the mems structure; and
a set of light blocking electrical interconnect layers disposed between the electrical circuitry and the MEMs structure, wherein the light blocking electrical interconnect layers have openings configured to cause incident light that passes from the MEMs structure to travel through indirect paths and be significantly attenuated before reaching the electrical circuitry. - View Dependent Claims (21, 22, 23, 24)
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Specification