Method and apparatus for automatically detecting and correcting misalignment of a semiconductor chip
First Claim
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1. A method for automatically detecting and correcting a misalignment of a semiconductor chip, comprising:
- using a position-detection mechanism integrated with the chip to determine the misalignment of the chip from a desired alignment for the chip; and
using an actuation mechanism integrated with the chip to automatically correct the misalignment.
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Abstract
One embodiment of the present invention provides a system that automatically detects and corrects a misalignment of a semiconductor chip. During operation, the system uses a position-detection mechanism integrated with the chip to determine the misalignment of the chip from a desired alignment for the chip. Next, the system uses an actuation mechanism integrated with the chip to automatically correct the misalignment, thereby improving performance and reliability of the chip.
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Citations
21 Claims
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1. A method for automatically detecting and correcting a misalignment of a semiconductor chip, comprising:
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using a position-detection mechanism integrated with the chip to determine the misalignment of the chip from a desired alignment for the chip; and using an actuation mechanism integrated with the chip to automatically correct the misalignment. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8)
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9. A computer-readable storage medium storing instructions that when executed by a computer cause the computer to perform a method for automatically detecting and correcting a misalignment of a semiconductor chip, comprising:
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using signals received from a position-detection mechanism integrated with the chip to determine the misalignment of the chip from a desired alignment for the chip; and sending signals to an actuation mechanism integrated with the chip to automatically correct the misalignment. - View Dependent Claims (10, 11, 12, 13, 14, 15, 16)
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17. An apparatus for automatically detecting and correcting a misalignment of a semiconductor chip, comprising:
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a position-detection mechanism integrated with the chip and configured to determine the misalignment of the chip from a desired alignment for the chip; and an actuation mechanism integrated with the chip and configured to automatically correct the misalignment. - View Dependent Claims (18, 19, 20, 21)
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Specification