Support structure for free-standing MEMS device and methods for forming the same
First Claim
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1. A microelectromechanical (MEMS) device comprising:
- a functional layer comprising a first material;
a deformable layer comprising a second material different from the first material; and
a connecting element comprising the first material, the connecting element mechanically coupled to the deformable layer and the functional layer, wherein the connecting element and the deformable layer form an interface between the first material and the second material, the interface spaced from the functional layer.
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Abstract
A microelectromechanical (MEMS) device includes a functional layer including a first material, a deformable layer including a second material different from the first material, and a connecting element including the first material. The connecting element is mechanically coupled to the deformable layer and the functional layer. The connecting element and the deformable layer form an interface between the first material and the second material. The interface is spaced from the functional layer.
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Citations
38 Claims
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1. A microelectromechanical (MEMS) device comprising:
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a functional layer comprising a first material; a deformable layer comprising a second material different from the first material; and a connecting element comprising the first material, the connecting element mechanically coupled to the deformable layer and the functional layer, wherein the connecting element and the deformable layer form an interface between the first material and the second material, the interface spaced from the functional layer. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21)
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22. A microelectromechanical (MEMS) device comprising:
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means for controlling a signal, the controlling means comprising a first material; means for supporting the controlling means, the supporting means comprising a second material different from the first material; and means for coupling the controlling means with the supporting means, the coupling means comprising the first material, the coupling means mechanically coupled to the supporting means and the controlling means, wherein the coupling means and the supporting means form an interface between the first material and the second material, the interface spaced from the controlling means. - View Dependent Claims (23, 24, 25, 26)
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27. A method of manufacturing a microelectromechanical (MEMS) device on a substrate, the method comprising:
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forming a functional layer comprising a first material; forming a sacrificial layer over the functional layer; forming a deformable layer comprising a second material over the sacrificial layer, the second material different from the first material; forming a connecting element comprising the first material, the connecting element fused to the functional layer; removing the sacrificial layer; and mechanically coupling the connecting element to the deformable layer, wherein the connecting element and the deformable layer form an interface between the first material and the second material, the interface spaced from the functional layer. - View Dependent Claims (28, 29, 30, 31, 32, 33, 34, 35, 36, 37, 38)
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Specification