IMPLANTABLE BIOCOMPATIBLE COMPONENT INTEGRATING AN ACTIVE SENSOR FOR MEASUREMENT OF A PHYSIOLOGICAL PARAMETER, A MICRO-ELECTROMECHANICAL SYSTEM OR AN INTEGRATED CIRCUIT
First Claim
1. A biocompatible component implantable in the human body, comprising:
- an active element of the type selected from among the group consisting of a sensor for the measurement of a physiologic parameter, a micro-electromechanical system, and an integrated electronic circuit;
a base substrate made of silicon or quartz having a first face and a second face, said active element being integrated on said first face;
metal pads that are biocompatible relative to an external environment, formed on said second face of said substrate;
electrical connections integrated on the substrate for connecting said pads to the active element;
vias for connecting said metal pads to said conductors in contact with said active integrated element, said vias being hollowed through the substrate and filled with a metal; and
a lid made of silicon or quartz covering and peripherally enclosing said substrate in a hermetic manner, said lid being located on the side of said first face integrating the active element;
said component being essentially void of a metallic case for insulation between said active element and said external environment, and void of insulating feedthroughs for electronic connection to the active element.
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Accused Products
Abstract
An implantable biocompatible component (10) integrating an active element of the type of a sensor for the measurement of a physiologic parameter, a micro-electromechanical system and an integrated electronic circuit. This component (10) has a substrate (12) and a lid (22) in silicon or quartz. The substrate (12) integrates the active element (14) and biocompatible metallic pads (16), electrically connected to the active element. The lid (22) encompasses and peripherally closes the substrate in a hermetic manner, level with the face integrating the active element. This component is void of metallic case for insulation between the active element and outside environment, and of insulative feedthrough for electrical connection to the active element. The substrate and lid can be directly welded to each other through their faces in vis-à-vis, or by interpositioning a sealing ring made of a biocompatible material.
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Citations
12 Claims
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1. A biocompatible component implantable in the human body, comprising:
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an active element of the type selected from among the group consisting of a sensor for the measurement of a physiologic parameter, a micro-electromechanical system, and an integrated electronic circuit;
a base substrate made of silicon or quartz having a first face and a second face, said active element being integrated on said first face;
metal pads that are biocompatible relative to an external environment, formed on said second face of said substrate;
electrical connections integrated on the substrate for connecting said pads to the active element;
vias for connecting said metal pads to said conductors in contact with said active integrated element, said vias being hollowed through the substrate and filled with a metal; and
a lid made of silicon or quartz covering and peripherally enclosing said substrate in a hermetic manner, said lid being located on the side of said first face integrating the active element;
said component being essentially void of a metallic case for insulation between said active element and said external environment, and void of insulating feedthroughs for electronic connection to the active element. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12)
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Specification