Micropump for Integrated Device for Biological Analyses
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Abstract
A micropump includes a body (10) of semiconductor material, accommodating fluid-tight chambers (32), having an internal preset pressure, lower than atmospheric pressure. The fluid-tight chambers (32), sealed by a diaphragm (35) that can be electrically opened, are selectively openable using a first electrode (37) and second electrodes (38), accommodating between them portions of the diaphragm (35).
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Citations
20 Claims
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1-11. -11. (canceled)
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12. A process for manufacturing a vacuum micropump, comprising the steps of:
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a) forming cavities in a substrate of a wafer of semiconductor material; and b) sealing said cavities at a preset pressure. - View Dependent Claims (13, 14, 15, 16, 17)
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20. A microfluidic device comprising:
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a) a microfluidic circuit; and b) a micropump, for moving a fluid through the microfluidic circuit, wherein the micropump comprises a body of semiconductor material, and a plurality of fluid-tight chambers, selectively openable, formed within said body and having internally a preset pressure and wherein a pressure differential is present between the fluid-tight chambers and the microfluidic circuit.
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Specification