Deposition Repair Apparatus And Methods
First Claim
1. An Apparatus comprising:
- an imaging block comprising a camera and an illuminator;
a first lens being selectively positioned coaxially with an optical path of the imaging block to focus the camera on a structure formed on the substrate to enable the review of the structure;
a laser assembly adapted to deliver a laser beam having an optical path coaxial with an optical path of the imaging block;
said first lens being further adapted to focus the laser beam on the structure so as to remove a material present in the structure if the reviewed structure is identified as requiring material removal;
a carriage assembly adapted to carry and position a ribbon coated with a rheological compound in the path of the laser beam;
a second lens adapted to be selectively positioned coaxially with the optical path of the imaging block if the reviewed structure is identified as requiring material transfer, said second lens adapted to focus the laser beam on the ribbon so as to transfer the rheological compound positioned in the path of the laser beam to the structure; and
an auto focus sensor having an optical path coaxial with the optical path of the imaging block and adapted to maintain a distance between the substrate and the first lens within a predefined range during the material removal, said auto focus sensor also adapted to maintain a distance between the ribbon and the second lens within the predefined range during the transfer of the rheological compound.
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Accused Products
Abstract
An apparatus includes integrated review, material removal and material deposition functions. The apparatus performs the review, material removal and material deposition operations along the same optical axis. The apparatus includes, in part, a camera, a pair of lenses, and one or more lasers. A first lens is used to focus the camera along the optical axis on a structure formed on the target substrate undergoing review. The first lens is also used to focus the laser beam on the structure to remove a material present thereon if the reviewed structure is identified as requiring material removal. The second lens is used to focus the laser beam on a ribbon to transfer a rheological compound from a recessed well formed in the ribbon to the structure if the reviewed structure is identified as requiring material deposition
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Citations
70 Claims
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1. An Apparatus comprising:
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an imaging block comprising a camera and an illuminator; a first lens being selectively positioned coaxially with an optical path of the imaging block to focus the camera on a structure formed on the substrate to enable the review of the structure; a laser assembly adapted to deliver a laser beam having an optical path coaxial with an optical path of the imaging block;
said first lens being further adapted to focus the laser beam on the structure so as to remove a material present in the structure if the reviewed structure is identified as requiring material removal;a carriage assembly adapted to carry and position a ribbon coated with a rheological compound in the path of the laser beam; a second lens adapted to be selectively positioned coaxially with the optical path of the imaging block if the reviewed structure is identified as requiring material transfer, said second lens adapted to focus the laser beam on the ribbon so as to transfer the rheological compound positioned in the path of the laser beam to the structure; and an auto focus sensor having an optical path coaxial with the optical path of the imaging block and adapted to maintain a distance between the substrate and the first lens within a predefined range during the material removal, said auto focus sensor also adapted to maintain a distance between the ribbon and the second lens within the predefined range during the transfer of the rheological compound. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21, 22, 23, 24, 25, 26, 27, 28, 29, 30)
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31. An Apparatus comprising:
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an imaging block comprising a camera and an illuminator; a first lens being selectively positioned coaxially with an optical path of the imaging block to focus the camera on a structure formed on the substrate to enable the review of the structure; a laser assembly adapted to deliver a laser beam having an optical path coaxial with the optical path of the imaging block, said first lens being further adapted to focus the laser beam on the structure so as to remove a material present in the structure if the reviewed structure is identified as requiring material removal; a carriage assembly adapted to carry and position a ribbon coated with a rheological compound in the path of the laser beam; a second lens adapted to be selectively positioned coaxially with the optical path of the imaging block if the reviewed structure is identified as requiring material transfer, said second lens adapted to focus the laser beam on the ribbon so as to transfer the rheological compound positioned in the path of the laser beam to the structure; and a first Z-axis controller adapted to move a position of the first lens relative to the substrate and parallel to the optical path; and a second Z-axis controller also adapted to move a position of the ribbon with respect to the second lens and parallel to the optical path. - View Dependent Claims (32, 33, 34, 35, 36)
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37. An apparatus adapted to prepare a ribbon, the apparatus comprising:
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a first module adapted to form a recessed well in the ribbon; and a second module adapted to dispense ink in the recessed well.
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38. A method of performing an operation on a substrate, the method comprising:
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selectively positioning a first lens coaxially with an optical path of an imaging block to focus a camera disposed in the imaging block on a structure formed on the substrate to enable capturing of an image of the structure to review the structure; delivering a laser beam along the optical path to the structure; selectively positioning the first lens coaxially with the optical path if the reviewed structure is identified as requiring material removal; focusing the laser beam on the structure using the first lens so as to remove a material present in the structure; positioning a ribbon coated with a rheological compound in the path of the laser beam; selectively positioning a second lens coaxially with the optical path if the reviewed structure is identified as requiring material transfer; focusing the laser beam on the ribbon using the second lens so as to transfer the rheological compound to the structure; and maintaining a distance between the substrate and the first lens within the predefined range during the material removal; and maintaining a distance between the ribbon and the second lens within the predefined range during the transfer of the rheological compound. - View Dependent Claims (39, 40, 41, 42, 43, 44, 45, 46, 47, 48, 49, 50, 51, 52, 53, 54, 55, 56, 57, 58, 59, 60, 61, 62, 63, 64, 65, 66)
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67. A method of preparing a ribbon, the method comprising:
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forming a recessed well in the ribbon; and dispensing ink in the recessed well.
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68. A ribbon comprising:
a first recessed well formed coated with a first rheological compound, said first recessed well adapted to be positioned in the path of a laser beam operative to transfer the first rheological compound to a substrate, said ribbon being transparent to a wavelength of the laser beam. - View Dependent Claims (69, 70)
Specification