Deposition Repair Apparatus And Methods

• US 20080139075A1
• Filed: 05/14/2007
• Published: 06/12/2008
• Est. Priority Date: 05/12/2006
• Status: Active Grant

• Current Assignee: Photon Dynamics Incorporated (KLA Corporation), Navy The USA As Represented By The Secretary of The
• Original Assignee: Photon Dynamics Incorporated (KLA Corporation), The United States of America As Represented By The Secretary of Agriculture
• Inventors: Eldring, Joachim, Birrell, Steven Edward, Kwak, Justin, Young, Lydia J., Cable, Alan, Bailey, Thomas H., Auyeung, Raymond, Visser, Joel, Pique, Alberto
• Granted Patent: US 8,025,542 B2
• Time in Patent Office: Days
• US Class Current: 445/61
• CPC Class Codes: B23K 26/046 Automatically focusing the laser beam
• CPC Class Codes: B23K 26/048 by controlling the distance between laser head and workpiece
• CPC Class Codes: B23K 26/0613 having a common axis B23K26/0619 takes precedence
• CPC Class Codes: B23K 26/351 for trimming or tuning of electrical components
• CPC Class Codes: G02F 1/136259 Repairing; Defects

Abstract

An apparatus includes integrated review, material removal and material deposition functions. The apparatus performs the review, material removal and material deposition operations along the same optical axis. The apparatus includes, in part, a camera, a pair of lenses, and one or more lasers. A first lens is used to focus the camera along the optical axis on a structure formed on the target substrate undergoing review. The first lens is also used to focus the laser beam on the structure to remove a material present thereon if the reviewed structure is identified as requiring material removal. The second lens is used to focus the laser beam on a ribbon to transfer a rheological compound from a recessed well formed in the ribbon to the structure if the reviewed structure is identified as requiring material deposition

Claims

1. An Apparatus comprising:

an imaging block comprising a camera and an illuminator;

a first lens being selectively positioned coaxially with an optical path of the imaging block to focus the camera on a structure formed on the substrate to enable the review of the structure;

a laser assembly adapted to deliver a laser beam having an optical path coaxial with an optical path of the imaging block;

said first lens being further adapted to focus the laser beam on the structure so as to remove a material present in the structure if the reviewed structure is identified as requiring material removal;

a carriage assembly adapted to carry and position a ribbon coated with a rheological compound in the path of the laser beam;

a second lens adapted to be selectively positioned coaxially with the optical path of the imaging block if the reviewed structure is identified as requiring material transfer, said second lens adapted to focus the laser beam on the ribbon so as to transfer the rheological compound positioned in the path of the laser beam to the structure; and

an auto focus sensor having an optical path coaxial with the optical path of the imaging block and adapted to maintain a distance between the substrate and the first lens within a predefined range during the material removal, said auto focus sensor also adapted to maintain a distance between the ribbon and the second lens within the predefined range during the transfer of the rheological compound.

2. The apparatus of claim 1 wherein said imaging block is further adapted to capture an image of the structure after removal of the material therefrom.

3. The apparatus of claim 1 wherein said imaging block is further adapted to capture an image of the structure after deposition of the rheological compound on the substrate.

4. The apparatus of claim 1 wherein said auto focus sensor is a tracking auto focus sensor adapted to maintain a distance between the ribbon and the substrate within a predefined range as the ribbon is moved relative to the substrate.

5. The apparatus of claim 1 further comprising:

a variable shape aperture adapted to remain centered about the laser beam as the ribbon is moved relative to the laser beam.

6. The apparatus of claim 1 further comprising:

a variable aperture adapted to vary about a center of the laser beam so as to step across a field of view of the second lens.

7. The apparatus of claim 1 wherein said laser beam has a plurality of wavelengths concurrently present therein.

8. The apparatus of claim 1 wherein said laser assembly is adapted to set a wavelength of the laser beam to one of a plurality of a wavelengths at any given time.

9. The apparatus of claim 1 wherein said laser assembly further comprises a controller adapted to vary a pulse length of the laser beam.

10. The apparatus of claim 1 wherein said laser beam is further adapted to cure the rheological compound deposited on the substrate.

11. The apparatus of claim 1 further comprising:

a curing hardware comprising a heat source adapted to heat the rheological compound deposited on the substrate.

12. The apparatus of claim 11 wherein said heat source is a second laser beam.

13. The apparatus of claim 1 wherein said substrate is a panel selected from a group consisting of flat panel display and solar panel.

14. The apparatus of claim 1 wherein said deposited rheological compound provides an electrical connection between a pair of nodes.

15. The apparatus of claim 1 wherein said ribbon comprises:

a first recessed well coated with the rheological compound, said first recessed well adapted to be positioned in the path of the laser beam operative to transfer the rheological compound to the substrate, said ribbon being transparent to a wavelength of the laser beam.

16. The apparatus of claim 15 wherein said ribbon further comprises:

a second recessed well coated with a second rheological compound, said second recessed well adapted to be positioned in the path of the laser beam operative to transfer the second rheological compound to the substrate.

17. The apparatus of claim 1 wherein said ribbon comprises:

a first plurality of recessed wells formed along a length of the ribbon, each of the first plurality of recessed wells coated with a first rheological compound; and

a second plurality of recessed wells interleaved with the first plurality of recessed wells, each of the second plurality of recessed wells coated with a second rheological compound different from the first rheological compound, each of the plurality of said first and second recessed wells adapted to be positioned in the path of the laser beam operative to transfer the rheological compound disposed therein to the substrate, said ribbon being transparent to a wavelength of the laser beam.

18. The apparatus of claim 1 further comprising:

a ribbon preparation assembly adapted to prepare the ribbon on-demand.

19. The apparatus of claim 18 wherein said ribbon preparation assembly is adapted to prepare a ribbon comprising a first recessed well coated with the rheological compound, said first recessed well adapted to be positioned in the path of the laser beam operative to transfer the rheological compound to the substrate, said ribbon being transparent to a wavelength of the laser beam.

20. The apparatus of claim 19 wherein said ribbon further comprises a second recessed well coated with a second rheological compound, said second recessed well adapted to be positioned in the path of the laser beam operative to transfer the second rheological compound to the substrate.

21. The apparatus of claim 1 further comprising:

a first Z-axis controller adapted to move a position of the first lens relative to the substrate and in parallel to the optical path; and

a second Z-axis controller also adapted to move a position of the ribbon with respect to the second lens and in parallel to the optical path.

22. The apparatus of claim 21 wherein the second Z-axis controller is further adapted to park the ribbon in a home position.

23. The apparatus of claim 22 further comprising:

a cover adapted to cover the ribbon when the ribbon is parked in the home position.

24. The apparatus of claim 23 further comprising:

a temperature controller adapted to control a temperature of the ribbon parked in the cover.

25. The apparatus of claim 22 wherein the second Z-axis controller is further adapted to move the ribbon to a load/unload height to enable changing of the ribbon.

26. The apparatus of claim 21 further comprising:

a rotational axis controller adapted to rotate the ribbon relative to the second lens about an axis parallel to the optical path.

27. The apparatus of claim 26 wherein said rotational axis controller rotates the ribbon at a first angle to park the ribbon in a home position.

28. The apparatus of claim 26 wherein said rotational axis controller rotates the ribbon at a second angle to enable changing of the ribbon.

29. The apparatus of claim 1 further comprising:

an axis controller adapted to move a relative position of the ribbon in a plane perpendicular to the optical path of the laser beam.

30. The apparatus of claim 29 further comprising:

an axis controller adapted to move a relative position of the substrate in a plane perpendicular to the optical path of the laser beam.

31. An Apparatus comprising:

an imaging block comprising a camera and an illuminator;

a first lens being selectively positioned coaxially with an optical path of the imaging block to focus the camera on a structure formed on the substrate to enable the review of the structure;

a laser assembly adapted to deliver a laser beam having an optical path coaxial with the optical path of the imaging block, said first lens being further adapted to focus the laser beam on the structure so as to remove a material present in the structure if the reviewed structure is identified as requiring material removal;

a carriage assembly adapted to carry and position a ribbon coated with a rheological compound in the path of the laser beam;

a second lens adapted to be selectively positioned coaxially with the optical path of the imaging block if the reviewed structure is identified as requiring material transfer, said second lens adapted to focus the laser beam on the ribbon so as to transfer the rheological compound positioned in the path of the laser beam to the structure; and

a first Z-axis controller adapted to move a position of the first lens relative to the substrate and parallel to the optical path; and

a second Z-axis controller also adapted to move a position of the ribbon with respect to the second lens and parallel to the optical path.

32. The apparatus of claim 31 wherein the second Z-axis controller is further adapted to park the ribbon in a home position.

33. The apparatus of claim 32 further comprising:

a cover adapted to cover the ribbon when the ribbon is parked in the home position.

34. The apparatus of claim 33 further comprising:

a temperature controller adapted to control the temperature of the ribbon parked in the cover.

35. The apparatus of claim 31 further comprising:

an axis controller adapted to move a relative position of the ribbon in a plane perpendicular to the optical path of the laser beam.

36. The apparatus of claim 31 further comprising:

an axis controller adapted to move a relative position of the substrate in a plane perpendicular to the optical path of the laser beam.

37. An apparatus adapted to prepare a ribbon, the apparatus comprising:

a first module adapted to form a recessed well in the ribbon; and

a second module adapted to dispense ink in the recessed well.

38. A method of performing an operation on a substrate, the method comprising:

selectively positioning a first lens coaxially with an optical path of an imaging block to focus a camera disposed in the imaging block on a structure formed on the substrate to enable capturing of an image of the structure to review the structure;

delivering a laser beam along the optical path to the structure;

selectively positioning the first lens coaxially with the optical path if the reviewed structure is identified as requiring material removal;

focusing the laser beam on the structure using the first lens so as to remove a material present in the structure;

positioning a ribbon coated with a rheological compound in the path of the laser beam;

selectively positioning a second lens coaxially with the optical path if the reviewed structure is identified as requiring material transfer;

focusing the laser beam on the ribbon using the second lens so as to transfer the rheological compound to the structure; and

maintaining a distance between the substrate and the first lens within the predefined range during the material removal; and

maintaining a distance between the ribbon and the second lens within the predefined range during the transfer of the rheological compound.

39. The method of claim 38 further comprising:

capturing an image of the structure after removal of the material therefrom.

40. The method of claim 38 further comprising:

capturing an image of the structure after deposition of the rheological compound on the substrate.

41. The method of claim 38 further comprising:

maintaining a distance between the ribbon and the substrate within a predefined range as the ribbon is moved relative to the substrate.

42. The method of claim 38 further comprising:

maintaining a variable shape aperture centered about the laser beam as the ribbon is move relative to the laser beam.

43. The method of claim 38 further comprising:

varying a variable aperture about a center of the laser beam so as to step across a field of view of the second lens.

44. The method of claim 38 wherein said laser beam has a plurality of wavelengths concurrently present therein.

45. The method of claim 38 further comprising:

selecting a wavelength of the laser beam.

46. The method of claim 38 further comprising:

varying a pulse length of the laser beam.

47. The method of claim 38 further comprising:

curing the rheological compound deposited on the substrate using the laser beam.

48. The method of claim 38 further comprising:

heating the rheological compound deposited on the substrate.

49. The method of claim 48 further comprising:

heating the rheological compound deposited on the substrate using a second laser beam.

50. The method of claim 38 wherein said substrate is a panel selected from a group consisting of flat panel display and solar panel.

51. The method of claim 38 wherein said deposited rheological compound provides an electrical connection between a pair of nodes.

52. The method of claim 38 wherein said ribbon comprises a first recessed well coated with the rheological compound, said first recessed well adapted to be positioned in the optical path of the laser beam, said ribbon being transparent to a wavelength of the laser beam.

53. The method of claim 52 wherein said ribbon further comprises a second recessed well coated with a second rheological compound, said second recessed well adapted to be positioned in the optical path of the laser beam.

54. The method of claim 38 further comprising:

preparing the ribbon on-demand.

55. The method of claim 54 wherein said ribbon comprises a first recessed well coated with the rheological compound, said first recessed well adapted to be positioned in the optical path of the laser beam, said ribbon being transparent to a wavelength of the laser beam.

56. The method of claim 55 wherein said ribbon further comprises a second recessed well coated with a second rheological compound, said second recessed well adapted to be positioned in the optical path of the laser beam.

57. The method of claim 38 further comprising:

moving a position of the first lens relative to the substrate and parallel in to the optical path; and

moving a position of the ribbon relative to the second lens and in parallel to the optical path.

58. The method of claim 57 further comprising:

parking the ribbon in a home position.

59. The method of claim 58 further comprising:

covering the ribbon when parked in the home position.

60. The method of claim 59 further comprising:

controlling a temperature of the covered ribbon.

61. The method of claim 58 further comprising:

moving the ribbon to a load/unload position to enable changing of the ribbon.

62. The method of claim 57 further comprising:

rotate the ribbon relative to the second lens about an axis parallel to the optical path.

63. The method of claim 62 further comprising:

rotating the ribbon at a first angle to park the ribbon in a home position.

64. The method of claim 62 further comprising:

rotating the ribbon at a second angle to enable changing of the ribbon.

65. The method of claim 38 further comprising:

moving a relative position of the ribbon in a plane perpendicular to the optical path of the laser beam.

66. The method of claim 38 further comprising:

moving a relative position of the substrate in a plane perpendicular to the optical path of the laser beam.

67. A method of preparing a ribbon, the method comprising:

forming a recessed well in the ribbon; and

dispensing ink in the recessed well.

68. A ribbon comprising:

a first recessed well formed coated with a first rheological compound, said first recessed well adapted to be positioned in the path of a laser beam operative to transfer the first rheological compound to a substrate, said ribbon being transparent to a wavelength of the laser beam.

69. The ribbon of claim 68 wherein said recess has a depth ranging between 0.2 micrometer and 2 micrometers.

70. The ribbon of claim 68 further comprising:

a second recessed well coated with a second rheological compound different from the first rheological compound, said second recessed well adapted to be positioned in the path of the laser beam operative to transfer the second rheological compound to the substrate.