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MEMS thermal actuator and method of manufacture

  • US 20080191303A1
  • Filed: 02/14/2007
  • Published: 08/14/2008
  • Est. Priority Date: 02/14/2007
  • Status: Active Grant
First Claim
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1. A micromechanical actuator, comprising:

  • a silicon-on-insulator substrate having a device layer formed in a plane;

    a material inlaid in the plane of the device layer and configured to move substantially in the plane of the device layer;

    a silicon member formed from the device layer of a silicon-on-insulator substrate, configured to move substantially in the plane of the device layer, wherein movement of the inlaid material drives movement of the silicon member.

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