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ANGULAR VELOCITY DETECTING DEVICE

  • US 20090056444A1
  • Filed: 06/10/2008
  • Published: 03/05/2009
  • Est. Priority Date: 06/22/2007
  • Status: Active Grant
First Claim
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1. An angular rate detecting device in which an x-axis in a direction on a surface of the active layer;

  • a y-axis perpendicular to the x-axis in the surface of the active layer; and

    a z-axis perpendicular to the surface of the active layer are given to a substrate having a basement layer and an active layer on the basement layer interposing an interlayer insulating layer formed in a thickness direction, and a drive frame provided to the active layer so as to vibrate in the x-axis and a Coriolis frame provided so as to vibrate also in the y-axis following the vibration of the drive frame configure the angular rate detecting device for detecting a physical amount relating to the Coriolis force generated to the Coriolis frame when an angular rate about the z-axis is applied, the angular rate detecting device comprising;

    at least two fixed beams provided to extend in opposite directions in the y-axis direction orthogonal to the vibrating direction and sharing a fixed end;

    a free beam provided to extend in the x-axis direction and coupled with a free end of the fixed beam; and

    at least two supporting beams provided to the free beam and extending in the y-axis direction with a predetermined space from the fixed beam, and the other free end of the supporting beam is coupled with the drive frame near the fixed end.

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