METHOD OF MANUFACTURE FOR MICROELECTROMECHANICAL DEVICES
First Claim
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1. A method of manufacturing a microelectromechanical device, the method comprising:
- forming a first conductive layer, an isolation layer, and a second conductive layer, wherein the isolation layer is between the first and second conductive layers;
electrically coupling the first conductive layer to the second conductive layer;
removing the isolation layer to form a gap between the first and second conductive layers; and
electrically decoupling the first conductive layer from the second conductive layer after removing the isolation layer.
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Abstract
A method of manufacturing a microelectromechanical device includes forming at least two conductive layers on a substrate. An isolation layer is formed between the two conductive layers. The conductive layers are electrically coupled together and then the isolation layer is removed to form a gap between the conductive layers. The electrical coupling of the layers mitigates or eliminates the effects of electrostatic charge build up on the device during the removal process.
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Citations
20 Claims
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1. A method of manufacturing a microelectromechanical device, the method comprising:
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forming a first conductive layer, an isolation layer, and a second conductive layer, wherein the isolation layer is between the first and second conductive layers; electrically coupling the first conductive layer to the second conductive layer; removing the isolation layer to form a gap between the first and second conductive layers; and electrically decoupling the first conductive layer from the second conductive layer after removing the isolation layer. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19)
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20. A method of manufacturing a microelectromechanical device comprising a first conductive layer, a second conductive layer, and an isolation layer between the first and second conductive layers, the method comprising:
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electrically coupling the first conductive layer to the second conductive layer; and electrically decoupling the first conductive layer from the second conductive layer after removing the isolation layer.
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Specification