INTEGRATED MEMS 3D MULTI-SENSOR
First Claim
1. An apparatus comprising:
- a first capacitive bridge sensor having a first proof mass supported by a first set of springs to permit movement in a first axis; and
a second capacitive bridge sensor having a second proof mass located within the first proof mass, the second proof mass supported by a second set of springs to permit movement in a second axis.
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Accused Products
Abstract
Apparatus, methods, and systems for sensing acceleration and magnetic fields in all three axes from a first capacitive bridge sensor having a first proof mass; and a second capacitive bridge sensor having a second proof mass located within the first proof mass. The second proof mass is coupled to the first proof mass by springs that permit movement in the second axis. The of sense the remaining axis of interest may be done by a third and fourth capacitive bridge configured similar to that of the first and second capacitive bridge sensors. The third and fourth capacitive bridge sensors may be oriented 90 degrees off of the first and second capacitive bridge. An alternative is to locate a third capacitive bridge within the second proof mass.
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Citations
20 Claims
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1. An apparatus comprising:
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a first capacitive bridge sensor having a first proof mass supported by a first set of springs to permit movement in a first axis; and a second capacitive bridge sensor having a second proof mass located within the first proof mass, the second proof mass supported by a second set of springs to permit movement in a second axis. - View Dependent Claims (2, 3, 4, 5)
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6. An apparatus comprising,
an external capacitive bridge sensor having a first proof mass for sensing a first parameter in a first axis; -
an internal capacitive bridge sensor having a second proof mass suspended within the first proof mass for sensing the parameter in a second axis; and a third capacitive bridge sensor having a third proof mass for sensing the parameter in a third axis. - View Dependent Claims (7, 8, 9, 10, 11, 12, 13, 14, 15)
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16. A method comprising:
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sensing acceleration in a first axis with a first proof mass; sensing acceleration in a second axis with a second proof mass, the second proof mass being located within the first proof mass; and sensing acceleration in a third axis with a third proof mass. - View Dependent Claims (17, 18, 19, 20)
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Specification