METHODS FOR MEASUREMENT AND CHARACTERIZATION OF INTERFEROMETRIC MODULATORS
First Claim
1. A method of measuring one or more electrical characteristics of a microelectromechanical system (MEMS) device, the method comprising:
- applying a first signal to the MEMS device, wherein the first signal comprises a periodic electrical stimulus;
measuring an output signal of the MEMS device; and
combining a second signal with the output signal to obtain a resultant signal indicative of the one or more electrical characteristics of the MEMS device, wherein the second signal is orthogonal to the first signal.
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Accused Products
Abstract
Various methods are described to characterize interferometric modulators or similar devices. Measured voltages across interferometric modulators may be used to characterize transition voltages of the interferometric modulators. Measured currents may be analyzed by integration of measured current to provide an indication of a dynamic response of the interferometric modulator. Frequency analysis may be used to provide an indication of a hysteresis window of the interferometric modulator or mechanical properties of the interferometric modulator. Capacitance may be determined through signal correlation, and spread-spectrum analysis may be used to minimize the effect of noise or interference on measurements of various interferometric modulator parameters.
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Citations
18 Claims
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1. A method of measuring one or more electrical characteristics of a microelectromechanical system (MEMS) device, the method comprising:
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applying a first signal to the MEMS device, wherein the first signal comprises a periodic electrical stimulus; measuring an output signal of the MEMS device; and combining a second signal with the output signal to obtain a resultant signal indicative of the one or more electrical characteristics of the MEMS device, wherein the second signal is orthogonal to the first signal. - View Dependent Claims (2, 3, 4, 5)
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6. A device, comprising:
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a microelectromechanical system (MEMS) device; and circuitry configured to apply a periodic electrical stimulus to the MEMS device, measure an output signal of the MEMS device, and combine the output signal with a second signal orthogonal to the first signal to obtain a resultant signal, the resultant signal indicative of one or more electrical characteristics of the MEMS device. - View Dependent Claims (7, 8)
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9. A device, comprising:
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means for applying a periodic electrical stimulus to a microelectromechanical system (MEMS) device; means for measuring an output signal of the MEMS device; and means for correlating the output signal with a second signal orthogonal to the output signal to obtain a resultant signal, the resultant signal indicative of one or more electrical characteristics of the MEMS device. - View Dependent Claims (10, 11, 12)
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13. A display module, comprising:
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a display comprising a plurality of microelectromechanical system (MEMS) devices, wherein the MEMS devices include a movable electrode and a fixed electrode; driver circuitry configured to drive the MEMS-based display; and monitoring circuitry configured to; apply a driving signal to at least one of the MEMS devices, wherein the driving signal comprises a periodic electrical signal; measure the current through the at least one of the MEMS devices; and correlate the measured current with a second signal to obtain a resultant signal, the resultant signal indicative of one or more electrical characteristics of the at least one of the MEMS devices. - View Dependent Claims (14, 15, 16, 17, 18)
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Specification