METHODS FOR MEASUREMENT AND CHARACTERIZATION OF INTERFEROMETRIC MODULATORS
First Claim
1. A method of measuring electrical characteristics of a microelectromechanical system (MEMS) device, the method comprising:
- modulating an initial signal with an additional signal to generate an input signal, wherein the additional signal comprises a random or pseudo-random signal;
applying the input signal to the MEMS device;
measuring an output signal of the MEMS device;
demodulating the output signal to obtain a resultant signal, wherein the resultant signal is indicative of a response of the MEMS device to the initial signal; and
determining an electrical characteristic of the MEMS device based at least in part upon the resultant signal.
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Abstract
Various methods are described to characterize interferometric modulators or similar devices. Measured voltages across interferometric modulators may be used to characterize transition voltages of the interferometric modulators. Measured currents may be analyzed by integration of measured current to provide an indication of a dynamic response of the interferometric modulator. Frequency analysis may be used to provide an indication of a hysteresis window of the interferometric modulator or mechanical properties of the interferometric modulator. Capacitance may be determined through signal correlation, and spread-spectrum analysis may be used to minimize the effect of noise or interference on measurements of various interferometric modulator parameters.
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Citations
14 Claims
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1. A method of measuring electrical characteristics of a microelectromechanical system (MEMS) device, the method comprising:
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modulating an initial signal with an additional signal to generate an input signal, wherein the additional signal comprises a random or pseudo-random signal; applying the input signal to the MEMS device; measuring an output signal of the MEMS device; demodulating the output signal to obtain a resultant signal, wherein the resultant signal is indicative of a response of the MEMS device to the initial signal; and determining an electrical characteristic of the MEMS device based at least in part upon the resultant signal. - View Dependent Claims (2, 3, 4, 5, 7, 8, 9)
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6. A method of reducing an effect of interference on a measured signal characteristic of a microelectromechanical system (MEMS) device, the method comprising:
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modulating an input signal with a modulation signal to generate an modulated input signal, wherein the modulation signal comprises a significant amount of randomness; applying the modulated input signal to the MEMS device; measuring an output signal of the MEMS device; and demodulating the output signal to obtain a resultant signal, wherein the resultant signal is indicative of a response of the MEMS device to the input signal.
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10. A method of determining a capacitance of an interferometric modulator, the method comprising:
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modulating an input voltage signal with a modulation signal to obtain a modulated input signal, wherein the modulation signal comprises a random or pseudo-random signal; applying the modulated input signal to the interferometric modulator; measuring a current through the interferometric modulator; demodulating the measured current using a corrective signal to obtain a resultant signal, wherein the corrective signal comprises a time-based integral of the modulation signal; and determining the capacitance of the interferometric modulator based at least in part on the resultant signal.
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11. A device, comprising:
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a microelectromechanical system (MEMS) device; and circuitry configured to; apply a modulated driving signal to the MEMS device, wherein the modulated driving signal is generated by modulating an initial driving signal with a modulation signal having a high amount of randomness; measure an output signal of the MEMS device; and demodulate the output signal to obtain a resultant signal indicative of the response of the MEMS device to the initial driving signal. - View Dependent Claims (12, 13, 14)
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Specification