BULK ACOUSTIC RESONATOR ELECTRICAL IMPEDANCE TRANSFORMERS
First Claim
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1. An electrical impedance transformer, comprising:
- a first film bulk acoustic resonator (FBAR), having a first electrical impedance and a first resonance frequency comprising;
a first set of electrodes, having a first acoustic impedance; and
a first piezoelectric layer having a first thickness, wherein the first piezoelectric layer is disposed between the first set of electrodes;
a second FBAR, having a second electrical impedance and a second resonance frequency, and being disposed over the first FBAR, the second FBAR comprising;
a second set of electrodes, having a second acoustic impedance, which differs from the first acoustic impedance; and
a second piezoelectric layer having a second thickness, wherein the second piezoelectric layer is disposed between the second set of electrodes; and
a decoupling layer disposed between the first and the second FBARs, wherein the first electrical impedance differs from the second electrical impedance and the first and second resonance frequencies are substantially the same.
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Abstract
An electrical impedance transformer comprises a first film bulk acoustic resonator (FBAR), having a first electrical impedance and a first resonance frequency. The electrical impedance transformer also comprises: a second FBAR, having a second electrical impedance and a second resonance frequency, and being disposed over the first FBAR. The electrical impedance transformer also includes a decoupling layer disposed between the first and the second FBARs. The first electrical impedance differs from the second electrical impedance and the first and second resonance frequencies are substantially the same.
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Citations
18 Claims
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1. An electrical impedance transformer, comprising:
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a first film bulk acoustic resonator (FBAR), having a first electrical impedance and a first resonance frequency comprising;
a first set of electrodes, having a first acoustic impedance; and
a first piezoelectric layer having a first thickness, wherein the first piezoelectric layer is disposed between the first set of electrodes;a second FBAR, having a second electrical impedance and a second resonance frequency, and being disposed over the first FBAR, the second FBAR comprising;
a second set of electrodes, having a second acoustic impedance, which differs from the first acoustic impedance; and
a second piezoelectric layer having a second thickness, wherein the second piezoelectric layer is disposed between the second set of electrodes; anda decoupling layer disposed between the first and the second FBARs, wherein the first electrical impedance differs from the second electrical impedance and the first and second resonance frequencies are substantially the same. - View Dependent Claims (2, 3, 4, 5, 6, 7)
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8. An communication device, comprising:
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a first port; a second port; and an electrical impedance transformer between the first port and the second port, the transformer comprising; a first film bulk acoustic resonator (FBAR), having a first electrical impedance and a first resonance frequency comprising;
a first set of electrodes, having a first acoustic impedance; and
a first piezoelectric layer having a first thickness, wherein the first piezoelectric layer is disposed between the first set of electrodes;a second FBAR, having a second electrical impedance and a second resonance frequency, and being disposed over the first FBAR, the second FBAR comprising;
a second set of electrodes, having a second acoustic impedance, which differs from the first acoustic impedance; and
a second piezoelectric layer having a second thickness, wherein the second piezoelectric layer is disposed between the second set of electrodes; anda decoupling layer disposed between the first and the second FBARs, wherein the first electrical impedance differs from the second electrical impedance and the first and second resonance frequencies are substantially the same. - View Dependent Claims (9, 10, 11, 12, 13, 14, 15, 16, 17, 18)
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Specification