SOLID ORGANOMETALLIC COMPOUND-FILLED CONTAINER AND FILLING METHOD THEREOF

• US 20090283041A1
• Filed: 05/12/2009
• Published: 11/19/2009
• Est. Priority Date: 07/08/2003
• Status: Active Grant

• Current Assignee: Kenichi Haga, Kohichi Tokudome, Shizuo Tomiyasu
• Original Assignee: Kenichi Haga, Kohichi Tokudome, Shizuo Tomiyasu
• Inventors: TOMIYASU, Shizuo, Haga, Kenichi, Tokudome, Kohichi
• Granted Patent: US 8,092,604 B2
• Time in Patent Office: Days
• US Class Current: 118/726
• CPC Class Codes: C23C 16/4481 by evaporation using carrier gas in contact with the source material C23C16/4486 takes precedence
• CPC Class Codes: C30B 25/14 Feed and outlet means for the gases; Modifying the flow of the reactive gases
• CPC Class Codes: Y10T 428/13 Hollow or container type article [e.g., tube, vase, etc.]

Abstract

A solid organometallic compound novel filled container stably supplies an apparatus for vapor phase epitaxial growth such as an MOCVD apparatus with a solid organometallic compound over a long term. The solid organometallic compound-filled container has a carrier gas inlet and a carrier gas outlet. The interior of the filled container is separated into a plurality of vertical compartments. A carrier gas introduced via the carrier gas inlet flows through each of the vertical compartments and is then discharged via the carrier gas outlet.

Claims

1-13. -13. (canceled)

14. A solid organometallic compound-filled container comprising:

a container having an interior separated by at least one partition in a vertical direction such that said interior of said container comprises at least two vertically extending compartments;

a carrier gas inlet and a carrier gas outlet provided for said container for the supply of carrier gas to said container and the removal of carrier gas from said container;

said at least one partition comprises one or more partitions having an opening provided such that carrier gas can flow through said opening between respective said compartments;

said compartments each include a compartment inlet for carrier gas and a compartment outlet for carrier gas positioned such that gas will flow vertically through said compartments from one end of each of said compartments to the other, said compartment inlet and said compartment outlet in each of said compartments comprising one of said carrier gas inlet of said container, said carrier gas outlet of said container and said opening;

wherein, for each said compartment, said compartment inlet is positioned at one of (a) a position lower than or equal to one third of the internal height of said container from an internal bottom of said container, and (b) a position more than or equal to two thirds of the internal height of said container from said internal bottom of said container, and said compartment outlet is positioned at the other of (a) the position lower than or equal to one third of the internal height of said container from said internal bottom of said container, and (b) the position more than or equal to two thirds of the internal height of said container from said internal bottom of said container; and

organometallic compound filled in each said compartment to a point at least above the lower of said compartment inlet and said compartment outlet.

15. The solid organometallic compound-filled container of claim 14, wherein said opening is positioned at one of (a) a lower part of said partition and (b) an upper part of said partition.

16. The solid organometallic compound-filled container of claim 14, comprising a charging port for filling the solid organometallic compound into one of said at least two compartments, said charging port forming one of said carrier gas inlet and said carrier gas outlet.

17. The solid organometallic compound-filled container of claim 14, wherein said solid organometallic compound is trimethylindium.

18. A solid organometallic compound filling method comprising filling the solid organometallic compound-filled container of claim 14 with a solid organometallic compound.

19. A solid organometallic compound filling method comprising filling the solid organometallic compound-filled container comprising:

a container having an interior separated by at least one partition in a vertical direction such that said interior of said container comprises at least two vertically extending compartments;

a carrier gas inlet and a carrier gas outlet provided for said container for the supply of carrier gas to said container and the removal of carrier gas from said container;

at least one carrier gas flow direction inverter arranged in said container such that when the carrier gas is introduced via said carrier gas inlet, the carrier gas flows downward through each of said vertically extending compartments before being discharged through said carrier gas outlet; and

organometallic compound filled in each said compartment;

wherein said carrier gas flow direction inverter comprises a communicating channel, a lower opening and an upper opening such that carrier gas introduced through said carrier gas inlet flows through each of said plurality of vertical compartments inside said filled container to said carrier gas outlet;

said communicating channel is arranged such that carrier gas introduced through said carrier gas inlet is introduced through said lower opening and discharged through said upper opening of said communicating channel via an opening in each of said at least one partitions,

with a solid organometallic compound.

20. A solid organometallic compound-filled container comprising:

a container having an interior separated by at least one partition in a vertical direction such that said interior of said container comprises at least two vertically extending compartments;

a carrier gas inlet and a carrier gas outlet provided for said container for the supply of carrier gas to said container and the removal of carrier gas from said container;

said at least one partition comprises one or more partitions having an opening provided such that carrier gas can flow through said opening between respective said compartments;

said compartments each include a compartment inlet for carrier gas and a compartment outlet for carrier gas positioned such that gas will flow vertically through said compartments from one end of each of said compartments to the other, said compartment inlet and said compartment outlet in each of said compartments comprising one of said carrier gas inlet of said container, said carrier gas outlet of said container and said opening;

wherein, for each said compartment, said compartment inlet is positioned at one of (a) a position lower than or equal to one third of the internal height of said container from an internal bottom of said container, and (b) a position more than or equal to two thirds of the internal height of said container from said internal bottom of said container, and said compartment outlet is positioned at the other of (a) the position lower than or equal to one third of the internal height of said container from said internal bottom of said container, and (b) the position more than or equal to two thirds of the internal height of said container from said internal bottom of said container; and

organometallic compound filled in each said compartment to a point at least above the lower of said compartment inlet and said compartment outlet;

wherein said at least one partition comprises a partition having said opening positioned such that carrier gas introduced from said carrier gas inlet flows through said solid organometallic compound of the one of said at least two vertically extending compartments, then through said opening, and then through said solid organometallic compound of the other of said at least two compartments to said carrier gas outlet.