Method for Fabricating a Heater Capable of Adjusting Refractive Index of an Optical Waveguide
First Claim
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1. A method for manufacturing a heater for adjusting index of refraction of an optical waveguide, said method comprising:
- forming a silicon block on a cladding layer on a substrate, wherein said silicon block is located in close proximity to an optical waveguide;
depositing a metal layer on said silicon block; and
annealing said silicon block to cause said metal layer to react with said silicon block to form a silicide layer.
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Abstract
A method for fabricating a thermal optical heating element capable of adjusting refractive index of an optical waveguide is disclosed. A silicon block is initially formed on a cladding layer on a silicon substrate. The silicon block is located in close proximity to an optical waveguide. A cobalt layer is deposited on the silicon block. The silicon block is then annealed to cause the cobalt layer to react with the silicon block to form a cobalt silicide layer. The silicon block is again annealed to cause the cobalt silicide layer to transform into a cobalt di-silicide layer.
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Citations
10 Claims
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1. A method for manufacturing a heater for adjusting index of refraction of an optical waveguide, said method comprising:
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forming a silicon block on a cladding layer on a substrate, wherein said silicon block is located in close proximity to an optical waveguide; depositing a metal layer on said silicon block; and annealing said silicon block to cause said metal layer to react with said silicon block to form a silicide layer. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10)
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