ARRANGEMENT FOR VAPORIZING MATERIALS AND METHOD FOR COATING SUBSTRATES
First Claim
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1. Arrangement for vaporizing materials, characterized bya) a stationary heating element,b) a device for transporting a carrier relative to the stationary heating element, wherein this carrier is provided with a layer whose vaporization temperature is lower than the vaporization temperature of the carrier.
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Abstract
The invention relates to an arrangement for the vaporization of materials, and specifically of organic materials, such as are utilized for example in the production of OLEDs. A heating element and a device for transporting a carrier for a layer to be vaporized are herein provided. The carrier with the layer to be vaporized is guided over the heating element where the layer is vaporized and deposited on a substrate.
48 Citations
16 Claims
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1. Arrangement for vaporizing materials, characterized by
a) a stationary heating element, b) a device for transporting a carrier relative to the stationary heating element, wherein this carrier is provided with a layer whose vaporization temperature is lower than the vaporization temperature of the carrier.
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13. Method for coating substrates with vaporized organic material, characterized by the following steps:
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a) the organic material is applied onto a carrier, b) the carrier with the organic material is transported into a vacuum chamber, c) the organic material is vaporized, d) the vaporized material is deposited on the substrate - View Dependent Claims (14, 15, 16)
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Specification