APPARATUS AND METHOD OF IN-SITU IDENTIFICATION FOR CONTAMINATION CONTROL IN SEMICONDUCTOR FABRICATION
First Claim
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1. An apparatus, comprising:
- a load port for receiving a container that houses a wafer, the load port being associated with a semiconductor processing tool; and
a detector disposed proximate the load port and external to the semiconductor processing tool, the detector being operable to detect a metal characteristic of the wafer, wherein the detected metal characteristic indicates whether the wafer is at a proper location.
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Abstract
An apparatus is provided that includes a load port for receiving a container that houses a wafer and a detector disposed proximate the load port such that the detector detects a metal characteristic of the wafer. The detected metal characteristic indicates whether the wafer is at a proper location. Also, provided is a method for use in semiconductor manufacture that includes providing a container that houses a wafer, receiving the container in a load port, detecting a metal characteristic of the wafer, and determining whether the wafer is at a proper location based on the detected metal characteristic of the wafer.
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Citations
20 Claims
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1. An apparatus, comprising:
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a load port for receiving a container that houses a wafer, the load port being associated with a semiconductor processing tool; and a detector disposed proximate the load port and external to the semiconductor processing tool, the detector being operable to detect a metal characteristic of the wafer, wherein the detected metal characteristic indicates whether the wafer is at a proper location. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8)
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9. A method for use in semiconductor manufacture, comprising:
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providing a container that houses a wafer; receiving the container in a load port; detecting a metal characteristic of the wafer; and determining whether the wafer is at a proper location based on the detected metal characteristic of the wafer. - View Dependent Claims (10, 11, 12, 13, 14)
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15. A system, comprising
a load port for receiving a container housing a plurality of wafers; -
a semiconductor processing tool for processing the wafers; a robot for transporting the wafers between the load port and the semiconductor processing tool; and a detector for detecting a magnetic characteristic of at least one of the wafers as the wafers are being transported, wherein the detected magnetic characteristic indicates whether the at least one of the wafers is at a proper location. - View Dependent Claims (16, 17, 18, 19, 20)
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Specification