COMPONENT-TRACKING SYSTEM AND METHODS THEREFOR
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Accused Products
Abstract
A system for facilitating plasma processing tool component management across plurality of tools is provided. The system includes means for receiving first component data for first plurality of components, including identification and usage history for a first plurality of components, at first database associated with first tool. The system also includes means for receiving second component data for second plurality of components at second database associated with second tool, which is different from first tool. The system further includes means for synchronizing first and second component data with third database. The synchronizing includes synchronizing between third database and at least one of first and second database rules that govern usage of at least one component of first and second plurality of components. The third database is coupled to exchange data with plurality of tools. The system yet also includes means for obtaining information, using rules and usage history data about given component prior to performing one of replacement, analysis, and maintenance.
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Citations
36 Claims
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1-18. -18. (canceled)
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19. A system for facilitating plasma processing tool component management across a plurality of tools, comprising:
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means for receiving first component data for a first plurality of components, including at least one of a plasma processing system component identification and a plasma processing system usage history for said first plurality of components, at a first database associated with a first tool of said plurality of tools; means for receiving second component data for a second plurality of components, including at least one of a plasma processing system component identification and a plasma processing system usage history for said second plurality of components, at a second database associated with a second tool of said plurality of tools, said second tool being different from said first tool; means for synchronizing said first component data and said second component data with a third database, said synchronizing including synchronizing between said third database and at least one of said first database and said second database a set of rules that governs usage of at least one component of said first plurality of components and said second plurality of components, said third database being coupled to exchange data with said plurality of tools, wherein said set of rules including at least one rule that governs at least one of maintaining and installing at least one plasma processing system component in said plasma processing system; and means for obtaining information, using said set of rules and usage history data at least in said third database, about a given component prior to performing one of replacement, analysis, and maintenance on said given component at one of said plurality of tools. - View Dependent Claims (20, 21, 22, 23, 24, 25, 26, 27)
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28. A system for facilitating plasma processing tool component management across a plurality of tools, comprising:
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computer readable code for receiving first component data for a first plurality of components, including at least one of a plasma processing system component identification and a plasma processing system usage history for said first plurality of components, at a first database associated with a first tool of said plurality of tools; computer readable code for receiving second component data for a second plurality of components, including at least one of a plasma processing system component identification and a plasma processing system usage history for said second plurality of components, at a second database associated with a second tool of said plurality of tools, said second tool being different from said first tool; computer readable code for synchronizing said first component data and said second component data with a third database, said synchronizing including synchronizing between said third database and at least one of said first database and said second database a set of rules that governs usage of at least one component of said first plurality of components and said second plurality of components, said third database being coupled to exchange data with said plurality of tools, wherein said set of rules including at least one rule that governs at least one of maintaining and installing at least one plasma processing system component in a plasma processing system; and computer readable code for obtaining information, using said set of rules and usage history data at least in said third database, about a given component prior to performing one of replacement, analysis, and maintenance on said given component at one of said plurality of tools. - View Dependent Claims (29, 30, 31, 32, 33, 34, 35, 36)
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Specification