PATTERNING OF THIN FILM LAYERS
First Claim
1. A method comprising:
- depositing a first conductive layer onto a surface;
patterning a dielectric layer on the first conductive layer;
patterning the first conductive layer using the patterned dielectric layer as a first mask;
depositing a second conductive layer onto the patterned dielectric layer;
patterning a passivation layer on the second conductive layer; and
patterning the second conductive layer using the patterned passivation layer as a second mask.
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Accused Products
Abstract
Simplified patterning of layers of a thin film is disclosed. In some embodiments, the patterning can include patterning a first conductive layer using a patterned dielectric layer as a mask and patterning a second conductive layer using a patterned passivation layer as another mask. In other embodiments, the patterning can include patterning a first conductive layer using a removable photosensitive layer as a mask, patterning a black mask layer using a removable photo mask, and patterning a second conductive layer using a patterned passivation layer as another mask. In still other embodiments, the patterning can include patterning a first conductive layer using a patterned black mask layer as a mask and patterning a second conductive layer using a patterned passivation layer as another mask. An exemplary device utilizing the thin film so patterned can include a touch sensor panel.
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Citations
25 Claims
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1. A method comprising:
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depositing a first conductive layer onto a surface; patterning a dielectric layer on the first conductive layer; patterning the first conductive layer using the patterned dielectric layer as a first mask; depositing a second conductive layer onto the patterned dielectric layer; patterning a passivation layer on the second conductive layer; and patterning the second conductive layer using the patterned passivation layer as a second mask. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9)
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10. A method comprising:
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depositing a first conductive layer onto a surface; patterning a removable photosensitive layer on the first conductive layer; patterning the first conductive layer using the patterned photosensitive layer as a first mask; patterning a black mask layer onto the patterned first conductive layer using a removable second mask; depositing a second conductive layer onto the patterned black mask layer; patterning a passivation layer on the second conductive layer; and patterning the second conductive layer using the patterned passivation layer as a third mask. - View Dependent Claims (11, 12, 13, 14, 15)
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16. A method comprising:
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depositing a first conductive layer onto a surface; patterning a black mask layer on the first conductive layer; patterning the first conductive layer using the patterned black mask layer as a first mask; depositing a second conductive layer onto the patterned black mask layer; patterning a passivation layer on the second conductive layer; and patterning the second conductive layer using the patterned passivation layer as a second mask. - View Dependent Claims (17, 18)
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19. A method comprising:
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depositing a conductive layer configured to transmit signals of an electronic device; developing a patterned photosensitive layer on the conductive layer; and patterning the conductive layer to have a same pattern as the patterned photosensitive layer. - View Dependent Claims (20, 21, 22, 23)
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24. A touch sensor panel comprising:
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a touch area comprising a first set of conductive traces and a second set of conductive traces forming touch sensors to sense a touch at the panel, and multiple conductive bridges at crossings of the first and second sets of conductive traces to separate the first and second conductive traces from each other and to conduct signals associated with the sensed touch along the first and second conductive traces at the crossings, each conductive bridge including a first layer that comprises conductive material and a second layer proximate to the first layer, the first layer having been formed using the second layer as a mask; and a bonding area comprising a third set of conductive traces forming connectors to connect the panel to associated circuitry, each of the third conductive traces having a third layer removed therefrom after acting as a mask to form the third conductive traces. - View Dependent Claims (25)
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Specification