METHOD FOR MODULATING LIGHT WITH MULTIPLE ELECTRODES
First Claim
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1. A method of making a MEMS device, the method comprising:
- providing a substrate;
forming a first layer on the substrate;
coupling first and second electrodes to the first layer;
forming a sacrificial layer on the first layer;
forming a second layer on the sacrificial layer; and
forming a cavity between the first and second layers by removing the sacrificial layer, wherein the cavity has a variable dimension, and is configured to cause the MEMS device to reflect a wavelength of light, and the first layer is configured to move relative to the second layer.
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Abstract
Improvements in an interferometric modulator that has a cavity defined by two walls.
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Citations
8 Claims
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1. A method of making a MEMS device, the method comprising:
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providing a substrate; forming a first layer on the substrate; coupling first and second electrodes to the first layer; forming a sacrificial layer on the first layer; forming a second layer on the sacrificial layer; and forming a cavity between the first and second layers by removing the sacrificial layer, wherein the cavity has a variable dimension, and is configured to cause the MEMS device to reflect a wavelength of light, and the first layer is configured to move relative to the second layer. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8)
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Specification