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Fast Scanning of a Target Region

  • US 20110303857A1
  • Filed: 09/12/2009
  • Published: 12/15/2011
  • Est. Priority Date: 09/26/2008
  • Status: Active Grant
First Claim
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1. Method for irradiating a target (102) with a beam (105) approaching target points, involving the following steps:

  • Measuring at least one of the parameters relating to the position of the beam and the intensity of the beam, changing the beam as a function of the at least one measured parameter, particularly as a function of a variance relating to the at least one measured parameter, characterized in that the at least one measured parameter is measured at the most once per target point.

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