Methods of Integrated Shielding into MTJ Device for MRAM

• US 20120205764A1
• Filed: 02/14/2011
• Published: 08/16/2012
• Est. Priority Date: 02/14/2011
• Status: Active Grant

• Current Assignee: Qualcomm, Inc.
• Original Assignee: Qualcomm, Inc.
• Inventors: Chen, Wei-Chuan, Li, Xia, Kang, Seung H.
• Granted Patent: US 8,557,610 B2
• Time in Patent Office: Days
• US Class Current: 257/422
• CPC Class Codes: G11C 11/16 using elements in which the storage effect is based on magnetic spin effect
• CPC Class Codes: G11C 11/161 details concerning the memory cell structure, e.g. the layers of the ferromagnetic memory cell
• CPC Class Codes: H01L 23/552 Protection against radiation, e.g. light or electromagnetic waves
• CPC Class Codes: H01L 2924/00 Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
• CPC Class Codes: H01L 2924/0002 Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00
• CPC Class Codes: H10B 53/00 Ferroelectric RAM [FeRAM] devices comprising ferroelectric memory capacitors
• CPC Class Codes: H10B 53/30 characterised by the memory core region
• CPC Class Codes: H10B 61/22 of the field-effect transistor [FET] type
• CPC Class Codes: H10N 50/01 Manufacture or treatment
• CPC Class Codes: H10N 50/10 Magnetoresistive devices
• CPC Class Codes: H10N 50/80 Constructional details

Abstract

Methods and apparatus for shielding a shielding a non-volatile memory, such as shielding a magnetic tunnel junction (MTJ) device from a magnetic flux are provided. In an example, a shielding layer is formed adjacent to an electrode of an MTJ device, such that the shielding layer substantially surrounds a surface of the electrode, and a metal line is coupled to the shielding layer. The metal line can be coupled to the shielding layer by a via.

Claims

1. A method for protecting a magnetic tunnel junction (MTJ) device by utilizing an integrated shielding apparatus, comprising:

forming an MTJ device on a substrate, wherein the MTJ device comprises;

a bottom electrode;

one or more pinned layers;

a barrier layer;

one or more free layers;

one or more hardmask layers; and

a top electrode;

forming a shielding layer over the top electrode, such that the shielding layer substantially surrounds a top surface of the top electrode; and

forming a metal line connection on the shielding layer.

2. The method of claim 1, wherein the shielding layer is formed of a high magnetic permeability material.

3. The method of claim 1, wherein metal line connection is through a via coupled to the shielding layer.

4. The method of claim 1, further comprising integrating the MTJ device into an apparatus, selected from the group consisting of a set top box, music player, video player, entertainment unit, navigation device, communications device, personal digital assistant (PDA), fixed location data unit, and a computer.

5. A non-transitory computer-readable medium, comprising instructions stored thereon that, if executed by a lithographic device, cause the lithographic device to perform at least a part of a method, comprising:

forming a magnetic tunnel junction (MTJ) device on a substrate, wherein the MTJ device comprises;

a bottom electrode;

one or more pinned layers;

a barrier layer;

one or more free layers;

one or more hardmask layers; and

a top electrode;

forming a shielding layer over the top electrode, such that the shielding layer substantially surrounds a top surface of the top electrode; and

forming a metal line connection on the shielding layer.

6. The computer-readable medium of claim 5, wherein the shielding layer is formed of a high magnetic permeability material.

7. The computer-readable medium of claim 5, wherein metal line connection is through a via coupled to the shielding layer.

8. A magnetic tunnel junction (MTJ) device protected by an integrated shielding apparatus, comprising:

an MTJ device on a substrate, wherein the MTJ device comprises;

a bottom electrode;

one or more pinned layers;

a barrier layer;

one or more free layers;

one or more hardmask layers; and

a top electrode;

a shielding layer over the top electrode, such that the shielding layer substantially surrounds a top surface of the top electrode; and

a metal line connection on the shielding layer.

9. The MTJ device of claim 8, wherein the shielding layer is formed of a high magnetic permeability material.

10. The MTJ device of claim 8, wherein metal line connection is through a via coupled to the shielding layer.

11. The MTJ device of claim 8, further comprising a device, selected from the group consisting of a set top box, music player, video player, entertainment unit, navigation device, communications device, personal digital assistant (PDA), fixed location data unit, and a computer, into which the MTJ device is integrated.

12. A magnetic tunnel junction (MTJ) device protected by an integrated shielding apparatus, comprising:

means for reducing a magnetic field intensity in a vicinity of an MTJ electrode using a shielding layer adjacent to the MTJ electrode, such that the shielding layer substantially surrounds a surface of the MTJ electrode; and

a metal line connection on the shielding layer.

13. The MTJ device of claim 12, wherein the shielding layer is formed of a high magnetic permeability material.

14. The MTJ device of claim 12, wherein metal line connection is through a via coupled to the shielding layer.

15. The MTJ device of claim 12, further comprising a device, selected from the group consisting of a set top box, music player, video player, entertainment unit, navigation device, communications device, personal digital assistant (PDA), fixed location data unit, and a computer, into which the MTJ device is integrated.

16. A method for protecting a magnetic tunnel junction (MTJ) device by utilizing an integrated shielding apparatus comprising:

forming an MTJ device on a substrate, wherein the MTJ device comprises;

a bottom electrode;

one or more pinned layers;

a barrier layer;

one or more free layers;

one or more hardmask layers; and

a first top electrode layer;

forming a shielding layer over the first top electrode layer, such that the shielding layer completely surrounds a top surface of the first top electrode layer;

forming a second top electrode layer over the shielding layer; and

forming a metal line connection on the second top electrode layer, such that the MTJ device is protected by the shielding layer from magnetic forces caused by the metal line.

17. The method of claim 16, wherein the shielding layer is formed of a high magnetic permeability material.

18. The method of claim 16, wherein metal line connection is through a via coupled to the second top electrode layer.

19. The method of claim 16, further comprising integrating the MTJ device into an apparatus, selected from the group consisting of a set top box, music player, video player, entertainment unit, navigation device, communications device, personal digital assistant (PDA), fixed location data unit, and a computer.

20. A non-transitory computer-readable medium, comprising instructions stored thereon that, if executed by a lithographic device, cause the lithographic device to perform at least a part of a method, comprising:

forming an MTJ device on a substrate, wherein the MTJ device comprises;

a bottom electrode;

one or more pinned layers;

a barrier layer;

one or more free layers;

one or more hardmask layers; and

a first top electrode layer;

forming a shielding layer over the first top electrode layer, such that the shielding layer completely surrounds a top surface of the first top electrode layer;

forming a second top electrode layer over the shielding layer; and

forming a metal line connection on the second top electrode layer, such that the MTJ device is protected by the shielding layer from magnetic forces caused by the metal line.

21. The computer-readable medium of claim 20, wherein the shielding layer is formed of a high magnetic permeability material.

22. The computer-readable medium of claim 20, wherein metal line connection is through a via coupled to the shielding layer.

23. A magnetic tunnel junction (MTJ) device protected by an integrated shielding apparatus, comprising:

an MTJ device on a substrate, wherein the MTJ device comprises;

a bottom electrode;

one or more pinned layers;

a barrier layer;

one or more free layers;

one or more hardmask layers; and

a first top electrode layer;

a shielding layer over the first top electrode layer, such that the shielding layer completely surrounds a top surface of the first top electrode layer;

a second top electrode layer over the shielding layer; and

a metal line connection on the second top electrode layer, such that the MTJ device is protected by the shielding layer from magnetic forces caused by the metal line.

24. The MTJ device of claim 23, wherein the shielding layer is formed of a high magnetic permeability material.

25. The MTJ device of claim 23, wherein metal line connection is through a via coupled to the shielding layer.

26. The MTJ device of claim 23, further comprising a device, selected from the group consisting of a set top box, music player, video player, entertainment unit, navigation device, communications device, personal digital assistant (PDA), fixed location data unit, and a computer, into which the MTJ device is integrated.

27. A magnetic tunnel junction (MTJ) device protected by an integrated shielding apparatus, comprising:

means for reducing a magnetic field intensity in a vicinity of a first MTJ electrode using a shielding layer over the first MTJ electrode, such that the shielding layer substantially surrounds a surface of the first MTJ electrode;

a second electrode layer adjacent to the shielding layer; and

a metal line coupled to the second electrode layer, such that the MTJ device is protected by the shielding layer from magnetic forces caused by the metal line.

28. The MTJ device of claim 27, wherein the shielding layer is formed of a high magnetic permeability material.

29. The MTJ device of claim 27, wherein metal line is coupled to the second electrode layer through a via coupled to the shielding layer.

30. The MTJ device of claim 27, further comprising a device, selected from the group consisting of a set top box, music player, video player, entertainment unit, navigation device, communications device, personal digital assistant (PDA), fixed location data unit, and a computer, into which the MTJ device is integrated.