FINE PITCH WIRE GRID POLARIZER
First Claim
1. A wire grid polarizer comprising:
- a. a substrate;
b. an array of parallel, elongated wires disposed on the substrate; and
c. the wires having a pitch of less than 80 nanometers.
1 Assignment
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Accused Products
Abstract
A fine pitch wire grid polarizer can have a pitch of less than 80 nanometers and a protective layer on the wires, by anisotropically etching the wire grid polarizer to form two parallel, elongated rods substantially located at corners where the wires contacted the substrate. The rods can be polarizing elements. A wire grid polarizer can have a repeated pattern of groups of parallel elongated wires disposed over a substrate. Each group of elongated wires comprises at least three wires. At least one wire at an interior of each group can be taller by more than about 10 nm than outermost wires of each group. Wires of a wire grid polarizer can be a byproduct of an etch reaction. A multi-step wire grid polarizer can comprise a base with a plurality of parallel multi-step ribs disposed on the base and a coating disposed along vertical surfaces of the steps.
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Citations
20 Claims
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1. A wire grid polarizer comprising:
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a. a substrate; b. an array of parallel, elongated wires disposed on the substrate; and c. the wires having a pitch of less than 80 nanometers. - View Dependent Claims (2, 3, 4)
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5. A polarizer, comprising:
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a. a substrate; b. a repeated pattern of groups of parallel elongated wires disposed over the substrate; c. each group of elongated wires comprising at least three wires; d. at least one wire at an interior of each group is taller by more than 10 nm than outermost wires of each group; and e. a distance between the outermost wires in each group is less than 1 micrometer. - View Dependent Claims (6, 7, 8, 9, 10, 11, 12, 13)
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14. A nanometer sized multi-step device, comprising:
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a. a base; b. a plurality of parallel multi-step ribs disposed on the base; c. each rib comprising multiple adjacent steps on each side thereof, the multiple adjacent steps comprising; i. an upper step with a top horizontal surface flanked by upper vertical surfaces; and ii. at least one pair of lower steps having two horizontal surfaces on opposite sides of the upper step, and flanked by lower vertical surfaces; d. a coating along the vertical surfaces of the upper step and the at least one pair of lower steps; and e. the coating along the vertical surface of any step is separate from the coating along a vertical surface of an adjacent step. - View Dependent Claims (15, 16, 17, 18, 19, 20)
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Specification