THREE-DIMENSIONAL NANO-STRUCTURE ARRAY

• US 20130089709A1
• Filed: 12/29/2011
• Published: 04/11/2013
• Est. Priority Date: 10/06/2011
• Status: Active Grant

• Current Assignee: Hon Hai Precision Industry Co., Ltd., Tsinghua University
• Original Assignee: Hon Hai Precision Industry Co., Ltd., Tsinghua University
• Inventors: ZHU, ZHEN-DONG, LI, QUN-QING, ZHANG, LI-HUI, CHEN, MO, JIN, YUAN-HAO, FAN, SHOU-SHAN
• Granted Patent: US 9,556,018 B2
• Time in Patent Office: Days
• US Class Current: 428/167
• CPC Class Codes: B81C 1/00111 Tips, pillars, i.e. raised structures microneedles A61M37/0015
• CPC Class Codes: B82Y 30/00 Nanotechnology for materials or surface science, e.g. nanocomposites
• CPC Class Codes: Y10T 428/24479 including variation in thickness
• CPC Class Codes: Y10T 428/2457 Parallel ribs and/or grooves

Abstract

A three-dimensional nano-structure array includes a substrate and a number of three-dimensional nano-structures. Each three-dimensional nano-structure has a first peak and a second peak aligned side by side. A first groove is defined between the first peak and the second peak. A second groove is defined between the two adjacent three-dimensional nano-structures. A depth of the first groove is lower than that of the second groove.

Claims

1. A three-dimensional nano-structure array, comprising:

a substrate having a plurality of three-dimensional nano-structures, wherein each of the three-dimensional nano-structures has a first peak and a second peak aligned side by side, a first groove is defined between the first peak and the second peak, a second groove is defined between every two adjacent three-dimensional nano-structures of the three-dimensional nano-structures, and a depth of the first groove is smaller than a depth of the second groove.

2. The three-dimensional nano-structure array of claim 1, wherein each three-dimensional nano-structure is a bar-shaped protruding structure extending along a straight line, a curvy line, or a polygonal line.

3. The three-dimensional nano-structure array of claim 1, wherein a cross-section of each three-dimensional nano-structure is M-shaped.

4. The three-dimensional nano-structure array of claim 1, wherein a cross-section of the first peak is trapezoidal or triangular, and a cross-section of the second peak is trapezoidal or triangular.

5. The three-dimensional nano-structure array of claim 1, wherein the first peak comprises a first surface and a second surface intersected with each other to form a first include angle, and the second peak comprises a third surface and the fourth surface intersected with each other to form a second include angle, both the first include angle and the second include angle range from about 30 degrees to about 90 degrees.

6. The three-dimensional nano-structure array of claim 1, wherein both the first peak and the second peak have the highest point, a distance between the highest point of the first peak and the highest point of the second peak is smaller than a width of each three-dimensional nano-structure.

7. The three-dimensional nano-structure array of claim 6, wherein the width of each of the three-dimensional nano-structures ranges from about 100 nanometers to about 300 nanometers.

8. The three-dimensional nano-structure array of claim 1, wherein a distance between every two adjacent three-dimensional nanostructures of the three-dimensional nano-structures is substantially equal.

9. The three-dimensional nano-structure array of claim 8, wherein the distance between every two adjacent three-dimensional nanostructures of the three-dimensional nano-structures ranges from about 0 nanometers to about 200 nanometers.

10. The three-dimensional nano-structure array of claim 1, wherein the plurality of three-dimensional nano-structures is periodically aligned, and a period of the plurality of three-dimensional nano-structures ranges from about 100 nanometers to about 500 nanometers.

11. The three-dimensional nano-structure array of claim 1, wherein a cross-section of the first groove is V-shaped.

12. The three-dimensional nano-structure array of claim 11, wherein the depth of the first groove ranges from about 30 nanometers to about 120 nanometers.

13. The three-dimensional nano-structure array of claim 1, wherein a cross-section of the second groove is V-shaped or inverse trapezium.

14. The three-dimensional nano-structure array of claim 13, wherein the depth of the second groove ranges from about 100 nanometers to about 200 nanometers.

15. The three-dimensional nano-structure array of claim 1, wherein the plurality of three-dimensional nano-structures and the substrate are integrated to form an integrated structure.

16. The three-dimensional nano-structure array of claim 1, wherein the plurality of three-dimensional nano-structures is aligned side by side and extends to form a plurality of concentric circles.

17. The three-dimensional nano-structure array of claim 1, wherein the plurality of three-dimensional nano-structures is aligned side by side and extends to form a plurality of concentric rectangles.

18. The three-dimensional nano-structure array of claim 1, wherein the first groove, the second groove, the first peak and the second groove extend substantially along the same direction.

19. A three-dimensional nano-structure array, comprising:

a substrate comprising a surface, and a plurality of first grooves and a plurality of second grooves alternately defined in the surface, the plurality of first grooves and the plurality of second grooves extending substantially along the same direction, and a depth of the first groove is lower than a depth of the second groove.

20. A three-dimensional nano-structure array, comprising:

a substrate comprising a plurality of three-dimensional nano-structures, wherein the plurality of three-dimensional nano-structures are aligned side by side, and extend along the same direction, and a cross-section of each three-dimensional nano-structure is M-shaped.