METHOD FOR PRODUCING A CAPACITOR INCLUDING AN ARRAY OF NANOCAPACITORS
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Accused Products
Abstract
A method for producing a capacitor including an array of nanocapacitors, in which the following operations are performed using a mold having a sealed surface, as a lower surface, and a top surface through which a network of pores extend: (a) filling the pores of the mold and covering a top surface of the mold with an electrically conductive material, to form a structure including an array of nanoscale objects connected by a single substrate; (b) removing the mold; (c) depositing, on an outline of the structure obtained at the end of (b), at least one bilayer including a first layer of an electrically insulating material and a second layer of an electrically conductive material; and then (d) locally removing the at least one bilayer deposited in (c) from the substrate to form the electrical contact.
19 Citations
34 Claims
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1-17. -17. (canceled)
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18. A process for producing a capacitor including a nanocapacitor array, in which, starting with a mold having a closed side, as a backside, and a frontside onto which an array of pores opens, the process comprising:
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(a) filling pores in the mold and covering the frontside of this mold with an electrically conductive material to form a structure including an array of nano-objects connected by a single supporting member; (b) removing the mold; (c) depositing at least one bilayer made up of a first film of an electrically insulating material and a second film of an electrically conductive material on an outline of the structure obtained in (b); and
then(d) removing the at least one bilayer deposited in (c) locally from the supporting member to form an electrical contact. - View Dependent Claims (19, 20, 21, 22, 23, 24, 25, 26, 27, 28, 29, 30, 31, 32, 33, 34)
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Specification