MECHANICAL LIGHT MODULATORS WITH STRESSED BEAMS
First Claim
Patent Images
1. A light modulator comprising:
- a substrate having a surface; and
a modulation assembly coupled to the substrate including a modulation element and a first compliant beam, the first compliant beam including a first segment that extend away from a first anchor and a second segment that extends back towards the first anchor;
wherein the length of the first segment is different than the length of the second segment.
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Abstract
The invention relates to a light modulator including a substrate having a surface and a modulation assembly coupled to the substrate that includes a modulation element and a first compliant beam. The first compliant beam includes a first segment that extend away from a first anchor and a second segment that extends back towards the first anchor. The length of the first segment is different than the length of the second segment.
17 Citations
20 Claims
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1. A light modulator comprising:
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a substrate having a surface; and a modulation assembly coupled to the substrate including a modulation element and a first compliant beam, the first compliant beam including a first segment that extend away from a first anchor and a second segment that extends back towards the first anchor; wherein the length of the first segment is different than the length of the second segment. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14)
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15. An electromechanical device comprising:
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a substrate having a surface; and an electromechanical assembly coupled to the substrate including a movable element and a first compliant beam, the first compliant beam including a first segment that extend away from a first anchor and a second segment that extends back towards the first anchor; wherein the length of the first segment is different than the length of the second segment. - View Dependent Claims (16, 17, 18, 19, 20)
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Specification