SCALE MEASURING DEVICE, METHOD FOR GENERATING POSITION INFORMATION, AND DEVICE WITH MULTI-AXIS STAGE
First Claim
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1. A scale device, comprising:
- a scale main body having at least two incremental tracks;
at least two or more incremental signal detection heads for detecting incremental signals from the incremental tracks; and
an operation processing unit which based upon detection outputs by the two or more incremental signal detection heads, generates relative positional information in a measuring direction of a measuring axis and parallel movement amount information in a direction orthogonal to the measuring direction.
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Abstract
A scale device includes a scale main body having at least two incremental tracks, at least two or more incremental signal detection heads for detecting incremental signals from the incremental tracks, and an operation processing unit that generates, based upon detection outputs by the two or more incremental signal detection heads, relative positional information in a measuring direction of a measuring axis and parallel movement amount information in a direction orthogonal to the measuring direction.
21 Citations
29 Claims
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1. A scale device, comprising:
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a scale main body having at least two incremental tracks; at least two or more incremental signal detection heads for detecting incremental signals from the incremental tracks; and an operation processing unit which based upon detection outputs by the two or more incremental signal detection heads, generates relative positional information in a measuring direction of a measuring axis and parallel movement amount information in a direction orthogonal to the measuring direction. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13)
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14. A multiaxial stage device comprising:
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a scale main body having an absolute track with an absolute pattern and incremental tracks formed by incremental signal patterns placed on two sides of the absolute track in a manner so as to be inclined by 45 degrees in reversed directions relative to a measuring direction, which is placed on each of axes; and an operation processing unit which based upon a detection output by an absolute pattern detection head for detecting the absolute pattern from the absolute track of the scale main body of each of the axes, generates absolute positional information, and by detecting incremental signals by two or more incremental signal detection heads from the incremental tracks, based upon detection outputs by the two or more incremental signal detection heads located on two incremental tracks formed with the absolute track being sandwiched therebetween, generates relative positional information in a measuring direction on a measuring axis and parallel movement amount information in a direction orthogonal to the measuring direction so that positional information is obtained, with the positional data obtained from the scale main bodies of the respective axes being mutually supplemented. - View Dependent Claims (15, 16, 17, 18, 19, 20, 21)
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22. A scale device, comprising:
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a scale having an incremental track on which an incremental pattern is recorded; an incremental signal detection head for detecting the incremental pattern; and a correction table on which a relationship between the strength of the incremental signal detected by the incremental signal detection head and a distance between the scale and the incremental signal detection head has been preliminarily recorded. - View Dependent Claims (23, 24, 25)
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26. A scale device, comprising:
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a scale having an incremental track on which an incremental pattern is recorded; an incremental signal detection head for detecting the incremental pattern; and operation means for finding a relationship between the strength of the incremental signal detected by the incremental signal detection head and a distance between the scale and the incremental signal detection head.
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27. A positional-information generation method for a scale device constituted by a scale having an incremental track on which an incremental pattern is recorded and an incremental signal detection head for detecting the incremental pattern, comprising the steps of:
by using a correction table on which a relationship between the strength of the incremental signal detected by the incremental signal detection head and a distance between the scale and the incremental signal detection head has been preliminarily recorded, based upon a detection output by the incremental signal detection head, generating relative positional information in a measuring direction on a measuring axis and positional information corresponding to a distance between the scale and the incremental signal detection head. - View Dependent Claims (28, 29)
Specification