BACK-END-OF-LINE METAL-OXIDE-SEMICONDUCTOR VARACTORS
First Claim
Patent Images
1. A method of fabricating a device structure, the method comprising:
- forming a first conductive layer on a dielectric layer;
forming a semiconductor layer on the first conductive layer, the semiconductor layer comprised of a silicon-containing semiconductor material in an amorphous state or a polycrystalline state;
forming a source region and a drain region in the semiconductor layer;
forming an insulator layer on the semiconductor layer; and
forming a second conductive layer on the insulator layer.
7 Assignments
0 Petitions
Accused Products
Abstract
Device structures, design structures, and fabrication methods for a varactor. The device structure includes a first electrode formed on a dielectric layer, and a semiconductor body formed on the first electrode. The semiconductor body is comprised of a silicon-containing semiconductor material in an amorphous state or a polycrystalline state. The device structure further includes an electrode insulator formed on the semiconductor body and a second electrode formed on the electrode insulator.
6 Citations
9 Claims
-
1. A method of fabricating a device structure, the method comprising:
-
forming a first conductive layer on a dielectric layer; forming a semiconductor layer on the first conductive layer, the semiconductor layer comprised of a silicon-containing semiconductor material in an amorphous state or a polycrystalline state; forming a source region and a drain region in the semiconductor layer; forming an insulator layer on the semiconductor layer; and forming a second conductive layer on the insulator layer. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8)
-
-
9-20. -20. (canceled)
Specification