Stationary vibration isolation system and method for controlling a vibration isolation system

• US 20140209779A1
• Filed: 01/27/2014
• Published: 07/31/2014
• Est. Priority Date: 01/29/2013
• Status: Active Grant

• Current Assignee: Integrated Dynamics Engineering GmbH (Aalberts NV)
• Original Assignee: Integrated Dynamics Engineering GmbH (Aalberts NV)
• Inventors: Kropp, Peter A., Kluth, Peter
• Granted Patent: US 9,618,076 B2
• Time in Patent Office: Days
• US Class Current: 248/550
• CPC Class Codes: F16F 15/005 using electro- or magnetostrictive actuation means generating of mechanical vibrations operating with electrostriction B06B1/06, with magnetostriction B06B1/08; vehicle suspension arrangements characterised by use of piezoelectric elements B60G17/01941; piezoelectric, electrostrictive and magnetostrictive devices per se H10N30/00
• CPC Class Codes: F16F 15/022 using dampers and springs in combination
• CPC Class Codes: F16F 15/027 comprising control arrangements F16F15/0237 takes precedence
• CPC Class Codes: F16F 2224/041 Dilatant
• CPC Class Codes: F16F 2224/043 electrorheological
• CPC Class Codes: F16F 2224/045 magnetorheological
• CPC Class Codes: F16F 9/532 Electrorheological [ER] fluid dampers
• CPC Class Codes: F16F 9/535 Magnetorheological [MR] fluid dampers springs comprising magnetorheological [MR] elastomers F16F1/361

Abstract

The invention relates to a stationary vibration isolation system and to a method for controlling such a system which comprises a damper effective in a horizontal direction which includes a fluid of variable viscosity.

Claims

1. A stationary vibration isolation system, comprising a load that is anti-vibration mounted in a horizontal direction and vertical direction on a base and which comprises a moving mass;

wherein the vibration-isolated load is coupled to the base via a damper which is effective in the horizontal direction and which comprises a fluid of variable viscosity.

2. The stationary vibration isolation system as claimed in claim 1, wherein the fluid is a non-Newtonian fluid.

3. The stationary vibration isolation system as claimed in claim 1, wherein the fluid is an electrorheological or magnetorheological fluid.

4. The stationary vibration isolation system as claimed in claim 3, wherein the vibration isolation system includes an active control which detects motion of the mass and controls the viscosity of the electrorheological or magnetorheological fluid based thereon.

5. The stationary vibration isolation system as claimed in claim 1, wherein the vibration isolation system which is an active vibration isolation system comprises at least one sensor for detecting vibrations of the anti-vibration mounted load and/or of the ground, and at least one actuator for actively reducing vibrations.

6. The stationary vibration isolation system as claimed in claim 5, wherein the actuator is a magnetic actuator.

7. The stationary vibration isolation system as claimed in claim 1, wherein the vibration-isolated load is coupled to the base via a damper which is effective in the vertical direction and which comprises a fluid of variable viscosity.

8. The stationary vibration isolation system as claimed in claim 1, wherein the fluid of variable viscosity is arranged in a vibration isolator.

9. The stationary vibration isolation system as claimed in claim 8, wherein the vibration isolator is a pneumatic spring that is effective in vertical and horizontal directions.

10. The stationary vibration isolation system as claimed in claim 9, wherein the pneumatic spring comprises a piston that has an extension which is immersed in a chamber containing the fluid of variable viscosity.

11. A method for controlling a vibration isolation system, wherein said vibration isolation system comprises a lithography apparatus including a moving mass, and wherein based on a motion of said mass a damper which is effective at least in a horizontal direction and which comprises an electrorheological or magnetorheological fluid is controlled in a manner so that the damping effect increases upon a change in motion of the mass.

12. The method for controlling a vibration isolation system as claimed in claim 11, wherein the lithography apparatus is a stepper.

13. The method for controlling a vibration isolation system as claimed in claim 11, wherein the moving mass is a displaceable table.

14. The method for controlling a vibration isolation system as claimed in claim 11, comprising detecting vibrations of the lithography apparatus or of the ground by at least one sensor, and controlling at least one actuator for active vibration isolation based on the detected vibrations.

15. The method for controlling a vibration isolation system as claimed in claim 14, wherein in calculating a signal for controlling the actuator, both the vibrations of the ground or of the lithography apparatus detected by the at least one sensor and the detected motion of the mass are considered.