ELECTROMECHANICAL TRANSDUCER, LIQUID DROPLET DISCHARGE HEAD, AND IMAGE FORMING APPARATUS
First Claim
1. An electromechanical transducer comprising:
- a substrate;
a diaphragm formed on the substrate; and
a piezoelectric element including;
a lower electrode;
a piezoelectric member; and
an upper electrode, whereina lower electrode film to form the lower electrode, a piezoelectric film to form the piezoelectric member, and an upper electrode film to form the upper electrode are laminated in layers on the diaphragm formed on the substrate;
the piezoelectric element is formed such that the lower electrode film, the piezoelectric member film, and the upper electrode film are patterned to form the lower electrode, the piezoelectric member, and the upper electrode, each of which has a desired pattern; and
corners of the lower electrode are rounded.
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Abstract
An electromechanical transducer includes a substrate; a diaphragm formed on the substrate; and a piezoelectric element that includes a lower electrode; a piezoelectric member; and an upper electrode, in which a lower electrode film to form the lower electrode, a piezoelectric film to form the piezoelectric member, and an upper electrode film to form the upper electrode are laminated in layers on the diaphragm formed on the substrate. The piezoelectric element is formed such that the lower electrode film, the piezoelectric member film, and the upper electrode film are patterned to form the lower electrode, the piezoelectric member, and the upper electrode, each of which has a desired pattern; and corners of the lower electrode are rounded.
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Citations
8 Claims
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1. An electromechanical transducer comprising:
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a substrate; a diaphragm formed on the substrate; and a piezoelectric element including; a lower electrode; a piezoelectric member; and an upper electrode, wherein a lower electrode film to form the lower electrode, a piezoelectric film to form the piezoelectric member, and an upper electrode film to form the upper electrode are laminated in layers on the diaphragm formed on the substrate; the piezoelectric element is formed such that the lower electrode film, the piezoelectric member film, and the upper electrode film are patterned to form the lower electrode, the piezoelectric member, and the upper electrode, each of which has a desired pattern; and corners of the lower electrode are rounded. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8)
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Specification