QUADRATURE COMPENSATION
First Claim
1. A microelectromechanical sensor device, comprising:
- a seismic mass;
a spring structure for suspending the seismic mass into a static support structure, wherein the spring structure defines for the seismic mass a drive direction, and a sense direction that is perpendicular to the drive direction;
excitation means for driving the seismic mass into linear oscillation, the linear oscillation having a direction which has a primary component in the drive direction and a secondary component by quadrature error in the sense direction;
a capacitive transducer structure that includes;
a stator to be anchored to a static support structure and including at least one stator surface,a rotor mechanically connected to the seismic mass, the rotor including a rotor surface positioned opposite the stator surface;
an electrical energy source configured to create an electrostatic force between the stator surface and the rotor surface;
whereinthe capacitive transducer structure is configured into a slanted orientation where a non-zero angle is formed between the drive direction and a tangent of the stator surface, and the electrostatic force is directed to decrease the secondary component of the linear oscillation.
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Accused Products
Abstract
A microelectromechanical sensor device that comprises a seismic mass, and a spring structure that defines for the seismic mass a drive direction, and a sense direction that is perpendicular to the drive direction. A capacitive transducer structure includes a stator to be anchored to a static support structure, and a rotor mechanically connected to the seismic mass. The capacitive transducer structure is arranged into a slanted orientation where a non-zero angle is formed between the drive direction and a tangent of the stator surface. The slated capacitive transducer structure creates an electrostatic force to decrease quadrature error of the linear oscillation.
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Citations
15 Claims
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1. A microelectromechanical sensor device, comprising:
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a seismic mass; a spring structure for suspending the seismic mass into a static support structure, wherein the spring structure defines for the seismic mass a drive direction, and a sense direction that is perpendicular to the drive direction; excitation means for driving the seismic mass into linear oscillation, the linear oscillation having a direction which has a primary component in the drive direction and a secondary component by quadrature error in the sense direction; a capacitive transducer structure that includes; a stator to be anchored to a static support structure and including at least one stator surface, a rotor mechanically connected to the seismic mass, the rotor including a rotor surface positioned opposite the stator surface; an electrical energy source configured to create an electrostatic force between the stator surface and the rotor surface;
whereinthe capacitive transducer structure is configured into a slanted orientation where a non-zero angle is formed between the drive direction and a tangent of the stator surface, and the electrostatic force is directed to decrease the secondary component of the linear oscillation. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15)
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Specification