Piezoelectric MEMS Resonator with Integrated Phase Change Material Switches
First Claim
1. A micro-electro-mechanical system (MEMS) resonator, comprising:
- a substrate, a first electrode supported by the substrate, a second electrode supported by the substrate, and terminal connections to the first electrode and the second electrode;
a piezoelectric material between the first electrode and the second electrode; and
a phase change material disposed to control the terminal connections to the electrodes, and comprising one or more switches operable between an ON state and an OFF state;
wherein application of heat to the phase change material causes the phase change material to change from an amorphous state to a crystalline state or from a crystalline state to an amorphous state, the amorphous state and the crystalline state each associated with one of the ON state and the OFF state.
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Accused Products
Abstract
A monolithic integration of phase change material (PCM) switches with a MEMS resonator is provided to implement switching and reconfiguration functionalities. MEMS resonator includes a piezoelectric material to control terminal connections to the electrodes. The PCM is operable between an ON state and an OFF state by application of heat, which causes the phase change material to change from an amorphous state to a crystalline state or from a crystalline state to an amorphous state, the amorphous state and the crystalline state each associated with one of the ON state and the OFF state. A method of fabricating the MEMS resonator with phase change material is provided. A reconfigurable filter system using the MEMS resonators is also provided.
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Citations
33 Claims
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1. A micro-electro-mechanical system (MEMS) resonator, comprising:
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a substrate, a first electrode supported by the substrate, a second electrode supported by the substrate, and terminal connections to the first electrode and the second electrode; a piezoelectric material between the first electrode and the second electrode; and a phase change material disposed to control the terminal connections to the electrodes, and comprising one or more switches operable between an ON state and an OFF state; wherein application of heat to the phase change material causes the phase change material to change from an amorphous state to a crystalline state or from a crystalline state to an amorphous state, the amorphous state and the crystalline state each associated with one of the ON state and the OFF state. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 12, 13, 14, 15, 16, 17, 19, 21, 23, 25, 26, 32)
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9-11. -11. (canceled)
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18. (canceled)
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20. (canceled)
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22. (canceled)
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24. (canceled)
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27-31. -31. (canceled)
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33-34. -34. (canceled)
Specification