SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING THE SAME
0 Assignments
0 Petitions
Accused Products
Abstract
It is an object to manufacture and provide a highly reliable display device including a thin film transistor with a high aperture ratio which has stable electric characteristics. In a manufacturing method of a semiconductor device having a thin film transistor in which a semiconductor layer including a channel formation region is formed using an oxide semiconductor film, a heat treatment for reducing moisture and the like which are impurities and for improving the purity of the oxide semiconductor film (a heat treatment for dehydration or dehydrogenation) is performed. Further, an aperture ratio is improved by forming a gate electrode layer, a source electrode layer, and a drain electrode layer using conductive films having light transmitting properties.
-
Citations
22 Claims
-
1. (canceled)
-
2. A display device comprising:
-
a scan line and a signal line intersecting with each other; a capacitor wiring having a light transmitting property; an insulating layer; a gate electrode layer, the gate electrode layer being in electrical contact with the scan line; a semiconductor layer overlapping with the gate electrode layer and interposed between the gate electrode layer and the insulating layer; a gate insulating layer interposed between the semiconductor layer and the gate electrode layer; a source electrode layer and a drain electrode layer in electrical contact with the semiconductor layer; a pixel electrode having transparency and being in electrical contact with the signal line through a serial connection comprising the source electrode layer, the semiconductor layer and the drain electrode layer; and a capacitor overlapping with the pixel electrode at least partly, the capacitor comprising the capacitor wiring, a capacitor electrode, and a dielectric layer interposed between the capacitor wiring and the capacitor electrode. - View Dependent Claims (3, 4, 5)
-
-
6. A display device comprising:
-
a scan line and a signal line intersecting with each other; a capacitor wiring having a light transmitting property; a gate electrode layer, the gate electrode layer being in electrical contact with the scan line; a semiconductor layer over the gate electrode layer; a gate insulating layer interposed between the gate electrode layer and the semiconductor layer; a source electrode layer and a drain electrode layer in electrical contact with the semiconductor layer; a pixel electrode having transparency and being in electrical contact with the signal line through a serial connection comprising the source electrode layer, the semiconductor layer and the drain electrode layer; an insulating layer over the semiconductor layer; and a capacitor overlapping with the pixel electrode at least partly, the capacitor comprising the capacitor wiring, a capacitor electrode, and the gate insulating layer interposed between the capacitor wiring and the capacitor electrode. - View Dependent Claims (7, 8, 9, 10, 11, 12, 13, 14)
-
-
15. A display device comprising:
-
a scan line and a signal line intersecting with each other; a capacitor wiring having a light transmitting property; a gate electrode layer, the gate electrode layer being in electrical contact with the scan line; a semiconductor layer formed over the gate electrode layer; a gate insulating layer interposed between the gate electrode layer and the semiconductor layer; a source electrode layer and a drain electrode layer in electrical contact with the semiconductor layer; a pixel electrode having transparency and being in electrical contact with the signal line through a serial connection comprising the source electrode layer, the semiconductor layer and the drain electrode layer; an insulating layer over the semiconductor layer; and a capacitor overlapping with the pixel electrode at least partly, the capacitor comprising the capacitor wiring, a capacitor electrode, and the insulating layer interposed between the capacitor wiring and the capacitor electrode. - View Dependent Claims (16, 17, 18, 19, 20, 21, 22)
-
Specification