Polishing apparatus

• US 6,629,883 B2
• Filed: 05/16/2001
• Issued: 10/07/2003
• Est. Priority Date: 05/16/2000
• Status: Expired due to Fees

• Current Assignee: Ebara Corporation
• Original Assignee: Ebara Corporation, Mitsubishi Materials Corporation
• Inventors: Katsuoka, Seiji, Sekimoto, Masahiko, Fujimoto, Kenji, Chiba, Kazuki, Miyazaki, Mitsuru, Noji, Naoki
• Primary Examiner(s): Hail, III, Joseph J.
• Assistant Examiner(s): OJINI, EZIAMARA ANTHONY
• Application Number:
  US09/855,677
• Publication Number:
  US 20010044266A1
• Time in Patent Office: 874 Days
• Field of Search: 451/67, 451/65, 451/66, 451/73, 451/287, 451/288, 451/290, 451/332, 451/333, 451/334, 511/315, 511/32, 134/62, 134/41, 134/287-289, 134/902
• US Class Current: 451/332
• CPC Class Codes: B24B 37/345 Feeding, loading or unloading work specially adapted to lapping
• CPC Class Codes: B24B 41/061 axially supporting turning workpieces, e.g. magnetically, pneumatically
• CPC Class Codes: H01L 21/67219 comprising at least one polishing chamber polishing apparatuses B24B
• CPC Class Codes: H01L 21/67745 characterized by movements or sequence of movements of transfer devices
• CPC Class Codes: H01L 21/68792 characterised by the construction of the shaft

Abstract

A multi-head type polishing apparatus includes a polishing table having a polishing surface, a plurality of top rings for holding workpieces and pressing the workpieces against the polishing surface, and a carousel for supporting the top rings and indexing the top rings. The polishing apparatus further includes a rotary transporter disposed in a position which can be accessed by the top rings, and having a plurality of portions positioned on a predetermined circumference from a center of rotation of the rotary transporter for holding the workpieces. The polishing apparatus also has a pusher for transferring the workpieces between the rotary transporter and the top rings.

Claims

1. A polishing apparatus comprising:

a polishing table having a polishing surface;

top rings for holding workpieces and pressing the workpieces against said polishing surface;

a carousel for supporting said top rings and indexing said top rings;

a rotary transporter disposed in a position which can be accessed by said top rings, said rotary transporter having on a circumference thereof portions for holding the workpieces, and said rotary transporter having an indexing function for indexing said portions; and

a pusher for transferring the workpieces between said rotary transporter and said top rings.

2. The polishing apparatus according to claim 1, wherein each of said top rings is connected to said carousel through a swing arm so as to be angularly movable by said swing arm to a polishing position on said polishing table and a loading and unloading position on said rotary transporter.

3. The polishing apparatus according to claim 1, further comprising a second polishing table provided adjacent to said polishing table, wherein each of said top rings can access said second polishing table.

4. The polishing apparatus according to claim 3, wherein said each of said top rings is connected to said carousel through a swing arm so as also to be angularly movable by said swing arm to access said second polishing table.

5. The polishing apparatus according to claim 1, wherein each of said top rings is connected to said carousel through a swing arm so as to be angularly movable by said swing arm to an overhanging position at which a polished workpiece held by a corresponding each of said top rings projects from said polishing surface so as to cause a part of a polished surface of the polished workpiece to be exposed.

6. The polishing apparatus according to claim 1, further comprising a reversing device for allowing transfer of the workpieces to and from said rotary transporter, and for reversing the workpieces.

7. The polishing apparatus according to claim 6, further comprising a vertically moveable lifter for holding and moving a workpiece, wherein when said reversing device is positioned above or below said rotary transporter transfer of the workpieces to and from said rotary transporter is to be conducted by said lifter.

8. A polishing apparatus comprising:

two polishing units, each of said two polishing units including;

(i) a polishing table having a polishing surface;

(ii) top rings for holding workpieces and pressing the workpieces against said polishing surface; and

(iii) a carousel for supporting said top rings and indexing said top rings;

two rotary transporters, said two rotary transporters being disposed in positions which can be accessed by said top rings of said two polishing units, respectively, each of said two rotary transporters having on a circumference thereof portions for holding the workpieces, and each of said two rotary transporters having an indexing function for indexing said portions; and

two pushers, said two pushers being adapted for transferring the workpieces between said two rotary transporters and said top rings of said two polishing units, respectively.

9. The polishing apparatus according to claim 8, wherein said each of said two polishing units also includes a carousel, with each of said top rings being connected to a corresponding said carousel through a swing arm so as to be angularly movable by said swing arm to a polishing position on a corresponding said polishing table and a loading and unloading position on a corresponding one of said two rotary transporters.

10. The polishing apparatus according to claim 8, wherein said each of said two polishing units also includes a second polishing table provided adjacent to a corresponding said polishing table, and each of said top rings can access a corresponding said second polishing table.

11. The polishing apparatus according to claim 10, wherein said each of said two polishing units also includes a carousel, with said each of said top rings being connected to a corresponding said carousel through a swing arm so as to be angularly movable by said swing arm to access said corresponding said second polishing table.

12. The polishing apparatus according to claim 8, wherein said each of said two polishing units also includes a carousel, with each of said top rings being connected to a corresponding said carousel through a swing arm so as also to be angularly movable by said swing arm to an overhanging position at which a polished workpiece held by said each of said top rings projects from a corresponding said polishing surface so as to cause a part of a polished surface of the polished workpiece to be exposed.

13. The polishing apparatus according to claim 8, further comprising two reversing devices for allowing transfer of the workpieces to and from said two rotary transporters, respectively, and for reversing the workpieces.

14. The polishing apparatus according to claim 13, further comprising two vertically moveable lifters each for holding and moving a workpiece, wherein when said two reversing devices are positioned above or below said two rotary transporters, respectively, transfer of the workpieces to and from said two rotary transporters is to be conducted by said two lifters, respectively.