Electronic device configured as a multichip module, leadframe, panel with leadframe positions, and method for producing the electronic device

• US 6,902,951 B2
• Filed: 10/29/2003
• Issued: 06/07/2005
• Est. Priority Date: 10/29/2002
• Status: Expired due to Fees

• Current Assignee: Infineon Technologies AG
• Original Assignee: Infineon Technologies AG
• Inventors: Woerner, Holger, Stuempfl, Christian, Goller, Bernd, Hagen, Robert-Christian, Wein, Stefan
• Primary Examiner(s): Cao, Phat X.
• Assistant Examiner(s): Doan, Theresa T.
• Application Number:
  US10/696,369
• Publication Number:
  US 20040140559A1
• Time in Patent Office: 587 Days
• Field of Search: 438/106, 438123-124, 438111-112, 257/666, 257/700
• US Class Current: 438/106
• CPC Class Codes: H01L 2224/04105 Bonding areas formed on an encapsulation of the semiconductor or solid-state body, e.g. bonding areas on chip-scale packages
• CPC Class Codes: H01L 2224/05554 being square
• CPC Class Codes: H01L 2224/05599 Material
• CPC Class Codes: H01L 2224/24137 the bodies being arranged next to each other, e.g. on a common substrate
• CPC Class Codes: H01L 2224/24227 the HDI interconnect not connecting to the same level of the item at which the semiconductor or solid-state body is mounted, e.g. the semiconductor or solid-state body being mounted in a cavity or on a protrusion of the item
• CPC Class Codes: H01L 2224/45015 being circular
• CPC Class Codes: H01L 2224/45099 Material
• CPC Class Codes: H01L 2224/48095 Kinked
• CPC Class Codes: H01L 2224/48227 connecting the wire to a bond pad of the item
• CPC Class Codes: H01L 2224/48465 the other connecting portion not on the bonding area being a wedge bond, i.e. ball-to-wedge, regular stitch
• CPC Class Codes: H01L 2224/82 by forming build-up interconnects at chip-level, e.g. for high density interconnects [HDI]
• CPC Class Codes: H01L 2224/85399 Material
• CPC Class Codes: H01L 2224/92 Specific sequence of method steps
• CPC Class Codes: H01L 2224/96 the devices being encapsulated in a common layer, e.g. neo-wafer or pseudo-wafer, said common layer being separable into individual assemblies after connecting
• CPC Class Codes: H01L 23/49833 the chip support structure consisting of a plurality of insulating substrates
• CPC Class Codes: H01L 23/5389 the chips being integrally enclosed by the interconnect and support structures
• CPC Class Codes: H01L 24/24 of an individual high density interconnect connector
• CPC Class Codes: H01L 24/48 of an individual wire connector
• CPC Class Codes: H01L 24/82 by forming build-up interconnects at chip-level, e.g. for high density interconnects [HDI] interconnection structure between a plurality of semiconductor chips H01L23/5389
• CPC Class Codes: H01L 24/96 the devices being encapsulated in a common layer, e.g. neo-wafer or pseudo-wafer, said common layer being separable into individual assemblies after connecting
• CPC Class Codes: H01L 25/0655 : the devices being arranged next to each other
• CPC Class Codes: H01L 2924/00 : Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
• CPC Class Codes: H01L 2924/00014 : the subject-matter covered by the group, the symbol of which is combined with the symbol of this group, being disclosed without further technical details
• CPC Class Codes: H01L 2924/01005 : Boron [B]
• CPC Class Codes: H01L 2924/01006 : Carbon [C]
• CPC Class Codes: H01L 2924/01033 : Arsenic [As]
• CPC Class Codes: H01L 2924/01082 : Lead [Pb]
• CPC Class Codes: H01L 2924/14 : Integrated circuits
• CPC Class Codes: H01L 2924/15311 : being a ball array, e.g. BGA
• CPC Class Codes: H01L 2924/181 : Encapsulation
• CPC Class Codes: H01L 2924/19041 : being a capacitor
• CPC Class Codes: H01L 2924/19042 : being an inductor
• CPC Class Codes: H01L 2924/19043 : being a resistor
• CPC Class Codes: H01L 2924/19104 : on the semiconductor or solid-state device, i.e. passive-on-chip
• CPC Class Codes: H01L 2924/19105 : in a side-by-side arrangement on a common die mounting substrate
• CPC Class Codes: H01L 2924/19106 : in a mirrored arrangement on two different side of a common die mounting substrate
• CPC Class Codes: H01L 2924/19107 : off-chip wires
• CPC Class Codes: H01L 2924/207 : Diameter ranges
• CPC Class Codes: H01L 2924/30105 : Capacitance
• CPC Class Codes: H01L 2924/30107 : Inductance

Abstract

An electronic device has, as a multichip module, two or more semiconductor chips that are integrated into a leadframe such that a placement side of the leadframe and the active top sides of the circuit chips are flush and have a common fine wiring plane. The leadframe is arranged as an expanded semiconductor chip on a rewiring substrate.

Claims

1. A method for producing an electronic device, the method which comprises:

producing a first panel with a plurality of leadframe positions configured in rows and columns, each one of the plurality of leadframe positions having at least two semiconductor chips embedded in a material of the first panel such that a plurality of active top sides of the semiconductor chips are flush with a top side of the first panel;

applying a common fine wiring structure to the plurality of active top sides of the semiconductor chips and to the top side of the first panel in each of the plurality of leadframe positions, and configuring a plurality of contact pads in edge regions of the plurality of leadframe positions;

separating the first panel into a plurality of individual leadframes;

producing a rewiring plate with a plurality of device positions configured in rows and columns, configuring a plurality of bonding areas in edge regions of each of the plurality of device positions, and distributing a plurality of external contact areas on an underside of the rewiring plate in each one of the plurality of the device positions;

applying a leadframe separated from the first panel in each one of the plurality of device positions of the rewiring plate while not covering the edge regions configured with the plurality of bonding areas;

producing a plurality of bonding connections between the plurality of contact pads in the edge regions of the plurality of leadframe positions and the plurality of bonding areas in the edge regions of each one of the plurality of device positions;

producing a second panel by covering the plurality of device positions with a plastic housing composition;

applying a plurality of external contacts on the plurality of external contact areas of the rewiring plate; and

separating the second panel into a plurality of individual electronic devices.

2. The method according to claim 1, which further comprises:

performing the step of applying the common fine wiring structure by using a photolithography method for finely patterning uniformly applied metal layers.

3. The method according to claim 1, which further comprises:

printing on a conductive paste and subsequently sintering the paste to form structures selected from a group consisting of interconnects, contact pads, bonding areas and passive components;

the structures used for a rewiring structure of the rewiring plate or a fine wiring structure of the first panel.

4. The method according to claim 1, which further comprises:

coating the plurality of contact pads in the edge regions of the plurality of leadframe positions with a bondable material.

5. The method according to claim 1, which further comprises:

performing the step of producing the plurality of bonding connections by thermocompression bonding a plurality of bonding wires on the plurality of the bonding areas and on the plurality of contact pads.

6. The method according to claim 1, which further comprises:

performing the step of covering the plurality of device positions with a plastic housing composition by using a transfer molding method.