Phased array antenna using (MEMS) devices on low-temperature co-fired ceramic (LTCC) substrates
First Claim
1. A phased array antenna system comprising:
- a plurality of sub-array modules integrated together to form the phased array antenna, andat least one amplifier connected to the plurality of sub-array modules,each of the sub-array modules being comprised of a plurality of radiating elements, each of the radiating elements including;
a first module comprised of a first plurality of low-temperature co-fired ceramic (“
LTCC”
) layers forming at least one first circuit used in the operation of the phased array antenna;
a second module comprised of a second plurality of LTCC layers forming at least a second circuit used in the operation of the phased-array antenna;
at least one radiating patch formed on the second module; and
at least one phase shifter fabricated from at least one microelectromechanical (“
MEMS”
) switch and formed between the first and second modules; and
wherein the second module is bonded to the first module so as to enclose the at least one MEMS phase shifter between the first and second modules.
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Abstract
A phased-array antenna system and other types of radio frequency (RF) devices and systems using microelectromechanical switches (“MEMS”) and low-temperature co-fired ceramic (“LTCC”) technology and a method of fabricating such phased-array antenna system and other types of radio frequency (RF) devices are disclosed. Each antenna or other type of device includes at least two multilayer ceramic modules and a MEMS device fabricated on one of the modules. Once fabrication of the MEMS device is completed, the two ceramic modules are bonded together, hermetically sealing the MEMS device, as well as allowing electrical connections between all device layers. The bottom ceramic module has also cavities at the backside for mounting integrated circuits. The internal layers are formed using conducting, resistive and high-k dielectric pastes available in standard LTCC fabrication and low-loss dielectric LTCC tape materials.
58 Citations
33 Claims
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1. A phased array antenna system comprising:
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a plurality of sub-array modules integrated together to form the phased array antenna, and at least one amplifier connected to the plurality of sub-array modules, each of the sub-array modules being comprised of a plurality of radiating elements, each of the radiating elements including; a first module comprised of a first plurality of low-temperature co-fired ceramic (“
LTCC”
) layers forming at least one first circuit used in the operation of the phased array antenna;a second module comprised of a second plurality of LTCC layers forming at least a second circuit used in the operation of the phased-array antenna; at least one radiating patch formed on the second module; and at least one phase shifter fabricated from at least one microelectromechanical (“
MEMS”
) switch and formed between the first and second modules; andwherein the second module is bonded to the first module so as to enclose the at least one MEMS phase shifter between the first and second modules. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21, 22, 23, 24)
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25. A phased array antenna system comprising:
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a plurality of low-temperature co-fired ceramic (“
LTCC”
) modules integrated together, andat least one amplifier connected to the plurality of LTCC modules, each LTCC module being a radiating element and being comprised of; a first plurality of LTCC layers forming at least one first circuit used in the operation of the phased array antenna; a second plurality of LTCC layers forming at least a second circuit used in the operation of the phased-array antenna; at least one microelectromechanical (“
MEMS”
) device formed between the first and second pluralities of LTCC layers, the second plurality of LTCC layers being bonded to the first plurality of LTCC layers whereby the at least one MEMS device is enclosed between the first and second pluralities of LTCC layers; andat least one radiating patch formed on the second plurality of LTCC layers. - View Dependent Claims (26, 27, 28, 29, 30)
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31. A phased array antenna system comprising:
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a plurality of sub-array modules formed on a low-temperature co-fired ceramic (“
LTCC”
) wafer, andat least one amplifier connected to the plurality of sub-array modules, each of the sub-array modules being comprised of a plurality of radiating elements, each of the radiating elements including; a first module comprised of a first plurality of LTCC layers forming at least one first circuit used in the operation of the phased array antenna; a second module comprised of a second plurality of LTCC layers forming at least a second circuit used in the operation of the phased-array antenna; at least one radiating patch formed on the second module; and at least one phase shifter fabricated from at least one microelectromechanical (“
MEMS”
) switch and formed between the first and second modules; andwherein the second module is bonded to the first module so as to enclose the at least one MEMS phase shifter between the first and second modules.
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32. A phased array antenna system comprising:
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a plurality of sub-array modules integrated together to form the phased array antenna, each of the sub-array modules being comprised of a plurality of radiating elements, each of the radiating elements including; a first module comprised of a first plurality of low-temperature co-fired ceramic (“
LTCC”
) layers forming at least one first circuit used in the operation of the phased array antenna;a second module comprised of a second plurality of LTCC layers forming at least a second circuit used in the operation of the phased-array antenna; at least one radiating patch and at least one amplifier connected to the radiating patch formed on the second module; and at least one phase shifter fabricated from at least one microelectromechanical (“
MEMS”
) switch and formed between the first and second modules; andwherein the second module is bonded to the first module so as to enclose the at least one MEMS phase shifter between the first and second modules.
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33. A phased array antenna system comprising:
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a plurality of sub-array modules integrated together to form the phased array antenna, and at least one amplifier connected to the plurality of sub-array modules, each of the sub-array modules being comprised of a plurality of radiating elements, each of the radiating elements including; at least a first module comprised of a first plurality of low-temperature co-fired ceramic (“
LTCC”
) layers forming at least one first circuit used in the operation of the phased array antenna;at least a second module comprised of a second plurality of LTCC layers forming at least a second circuit used in the operation of the phased-array antenna; at least one radiating patch formed on the second module; and at least one phase shifter fabricated from at least one microelectromechanical (“
MEMS”
) switch and formed between the first and second modules; andwherein the second module is bonded to the first module so as to enclose the at least one MEMS phase shifter between the first and second modules.
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Specification