Micro-electro-mechanical-system two dimensional mirror with articulated suspension structures for high fill factor arrays
First Claim
1. A micro-electro-mechanical-system (MEMS) mirror device, comprising:
- a mirror having a 2-dimensional rotational articulated hinge at a first end, and having a 1-dimensional rotational articulated hinge at a second end opposite the first end;
a movable cantilever connected to the mirror through the 1-dimensional rotational articulated hinge;
a support structure connected to the mirror through the 2-dimensional rotational articulated hinge and connected to the movable cantilever;
whereby movement of said movable cantilever causes rotation of the mirror in a first axis of rotation, and the mirror is also rotatable about a second torsional axis of rotation perpendicular to said first axis of rotation.
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Abstract
The invention provides a micro-electro-mechanical-system (MEMS) mirror device, comprising: a mirror having a 2-dimensional rotational articulated hinge at a first end, and having a 1-dimensional rotational articulated hinge at a second end opposite the first end; a movable cantilever connected to the mirror through the 1-dimensional rotational articulated hinge; a support structure connected to the mirror through the 2-dimensional rotational articulated hinge and connected to the movable cantilever; whereby movement of said movable cantilever causes rotation of the mirror in a first axis of rotation, and the mirror is also rotatable about a second torsional axis of rotation perpendicular to said first axis of rotation.
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Citations
29 Claims
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1. A micro-electro-mechanical-system (MEMS) mirror device, comprising:
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a mirror having a 2-dimensional rotational articulated hinge at a first end, and having a 1-dimensional rotational articulated hinge at a second end opposite the first end; a movable cantilever connected to the mirror through the 1-dimensional rotational articulated hinge; a support structure connected to the mirror through the 2-dimensional rotational articulated hinge and connected to the movable cantilever; whereby movement of said movable cantilever causes rotation of the mirror in a first axis of rotation, and the mirror is also rotatable about a second torsional axis of rotation perpendicular to said first axis of rotation. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21, 22, 23, 24)
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25. A 2-dimensional rotational articulated hinge for connection to a support structure and a device to be rotated, the hinge comprising:
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a first 1-dimensional rotational articulated hinge having a first mounting point at a first end for connection to the support structure and having a second end; a second 1-dimensional rotational articulated hinge having a second mounting point at a first end for connection to the support structure and having a second end, the second end of the first 1-dimensional rotational articulated hinge being connected to the second end of the second 1-dimensional rotational articulated hinge; a third 1-dimensional rotational articulated hinge having a first end connected to the second ends of the first and second articulated 1-dimensional rotational hinges and having a second end for connection to the device to be rotated; whereby the first 1-dimensional rotational articulated hinge and the second 1-dimensional rotational articulated hinge define a first axis of rotation between the first and second mounting points, and the third 1-dimensional rotational articulated hinge defines a second torsional axis of rotation perpendicular to the first axis of rotation between the first end and second end of the third 1-dimensional rotational articulated hinge. - View Dependent Claims (26, 27, 28, 29)
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Specification