High-sensitivity optical scanning using memory integration
First Claim
Patent Images
1. An inspection system comprising:
- an integrated circuit having formed thereon an at least one two dimensional array of photosensors and providing a plurality of pixelized images, each image representing a portion of an object to be inspected;
a composite image generator digitally adding together corresponding pixels of said plurality of images and providing a composite image of said object to be inspected; and
a defect analyzer operative to receive said composite image and to provide a defect report.
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Accused Products
Abstract
An inspection system includes a CMOS integrated circuit having integrally formed thereon an at least two dimensional array of photosensors and providing an inspection output representing an object to be inspected. A defect analyzer is operative to receive the inspection output and to provide a defect report.
36 Citations
56 Claims
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1. An inspection system comprising:
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an integrated circuit having formed thereon an at least one two dimensional array of photosensors and providing a plurality of pixelized images, each image representing a portion of an object to be inspected; a composite image generator digitally adding together corresponding pixels of said plurality of images and providing a composite image of said object to be inspected; and a defect analyzer operative to receive said composite image and to provide a defect report. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20)
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21. A method for inspecting objects comprising:
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acquiring a plurality of substantially overlapping pixelized images each image representing a portion of an object to be inspected; digitally adding together corresponding pixels of said images to provide a composite image of said object; and analyzing said composite image to detect defects in said object. - View Dependent Claims (22, 23, 24, 25, 26, 27)
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28. An imaging system comprising:
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an integrated circuit having formed thereon an at least one two dimensional array of photosensors and providing a plurality of pixelized images, each image representing a partially overlapping portion of an object to be imaged; and a composite image generator digitally adding together corresponding pixels of said plurality of images and providing a composite image of said object. - View Dependent Claims (29, 30, 31, 32, 33, 34, 35, 36, 37, 38, 39, 40, 41, 42, 43, 44, 45, 46, 47)
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48. A method for imaging objects comprising:
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acquiring a plurality of substantially overlapping pixelized images each image representing a portion of an object to be imaged; and digitally adding together corresponding pixels of said images to provide a composite image of said object. - View Dependent Claims (49, 50, 51, 52, 53, 54, 55, 56)
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Specification