Display panel, display panel inspection method, and display panel manufacturing method
First Claim
Patent Images
1. A method of manufacturing a display panel, comprising steps of:
- forming a conductive film electrically connected to a plurality of thin film transistors and a measurement wiring which are provided on an insulating surface;
making said plurality of thin film transistors in an on state, measuring a value of electric current flowing in said measurement wiring, and judging whether or not said plurality of thin film transistors are defective from said value; and
forming a plurality of pixel electrodes by patterning said conductive film after said judging.
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Accused Products
Abstract
A method of inspecting a display panel, which is capable of distinguishing between whether an EL panel is a good product or a defective product before sealing of the display panel, is provided. In a first method of inspection, a conductive film is patterned to forming pixel electrodes after measuring the electric current flowing in the conductive film and detecting defective pixels in accordance with the measured values. In a second method of inspection, all of the pixel electrodes are connected by an inspection conductive film, a value of electric current flowing in the inspection conductive film is measured, and the inspection conductive film is removed after detecting defective pixels in accordance with the measured values.
61 Citations
129 Claims
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1. A method of manufacturing a display panel, comprising steps of:
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forming a conductive film electrically connected to a plurality of thin film transistors and a measurement wiring which are provided on an insulating surface; making said plurality of thin film transistors in an on state, measuring a value of electric current flowing in said measurement wiring, and judging whether or not said plurality of thin film transistors are defective from said value; and forming a plurality of pixel electrodes by patterning said conductive film after said judging. - View Dependent Claims (2, 3, 4, 5, 6)
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7. A method of manufacturing a display panel, comprising steps of:
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forming an interlayer insulating film to cover a plurality of thin film transistors provided on an insulating surface; forming contact holes in said interlayer insulating film; forming a plurality of connecting wirings each of which are connected to source regions or drain regions of each of said plurality of thin film transistors through said contact holes, and a measurement wiring in contact with said insulating surface; forming a conductive film electrically connected to said plurality of connecting wirings and said measurement wiring; making said plurality of thin film transistors in an on state, measuring a value of electric current flowing in said measurement wiring, and judging whether or not said plurality of thin film transistors are defective from said value; and forming a plurality of pixel electrodes by patterning said conductive film after said judging. - View Dependent Claims (8, 9, 10, 11, 12)
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13. A method of manufacturing a display panel, comprising steps of:
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forming an inspection conductive film electrically connected to a plurality of pixel electrodes each of which are electrically connected to each of a plurality of thin film transistors respectively, and a measurement wiring, which are provided on an insulating surface; making said plurality of thin film transistors in an on state, measuring a value of electric current flowing in said measurement wiring, and judging whether or not said plurality of thin film transistors and said plurality of pixel electrodes are defective from said value; and removing said inspection conductive film. - View Dependent Claims (14, 15, 16, 17, 18, 19)
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20. A method of manufacturing a display panel, comprising steps of:
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forming an interlayer insulating film to cover a plurality of thin film transistors provided on an insulating surface; forming contact holes in said interlayer insulating film; forming a plurality of connecting wirings each of which are connected to source regions or drain regions of each of said plurality of thin film transistors through said contact holes, respectively, and a measurement wiring in contact with said insulating surface; forming a conductive film electrically connected to said plurality of connecting wirings; forming a plurality of pixel electrodes by patterning said conductive film; forming an inspection conductive film electrically connected to a plurality of pixel electrodes and said measurement wiring; making said plurality of thin film transistors in an on state, measuring a value of electric current flowing in said measurement wiring, and judging whether or not said plurality of thin film transistors and said plurality of pixel electrodes are defective from said value; and removing said inspection conductive film. - View Dependent Claims (21, 22, 23, 24, 25, 26)
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27. A display panel formed by a method of manufacturing the display panel, the method comprising steps of:
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forming a conductive film electrically connected to a plurality of thin film transistors and a measurement wiring which are provided on an insulating surface; making said plurality of thin film transistors in an on state, measuring a value of electric current flowing in said measurement wiring, and judging whether or not said plurality of thin film transistors are defective from said value; and forming a plurality of pixel electrodes by patterning said conductive film after said judging. - View Dependent Claims (28, 29, 30, 31)
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32. A display panel formed by a method of manufacturing the display panel, the method comprising steps of:
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forming an interlayer insulating film to cover a plurality of thin film transistors provided on an insulating surface; forming contact holes in said interlayer insulating film; forming a plurality of connecting wirings each of which are connected to source regions or drain regions of each of said plurality of thin film transistors through said contact holes, and a measurement wiring in contact with said insulating surface; forming a conductive film electrically connected to said plurality of connecting wirings and said measurement wiring; making said plurality of thin film transistors in an on state, measuring a value of electric current flowing in said measurement wiring, and judging whether or not said plurality of thin film transistors are defective from said value; and forming a plurality of pixel electrodes by patterning said conductive film after said judging. - View Dependent Claims (33, 34, 35, 36)
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37. A display panel formed by a method of manufacturing the display panel, the method comprising steps of:
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forming an inspection conductive film electrically connected to a plurality of pixel electrodes each of which are electrically connected to each of a plurality of thin film transistors respectively, and a measurement wiring, which are provided on an insulating surface; making said plurality of thin film transistors in an on state, measuring a value of electric current flowing in said measurement wiring, and judging whether or not said plurality of thin film transistors and said plurality of pixel electrodes are defective from said value; and removing said inspection conductive film. - View Dependent Claims (38, 39, 40, 41)
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42. A display panel formed by a method of manufacturing the display panel, the method comprising steps of:
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forming an interlayer insulating film to cover a plurality of thin film transistors provided on an insulating surface; forming contact holes in said interlayer insulating film; forming a plurality of connecting wirings each of which are connected to source regions or drain regions of each of said plurality of thin film transistors through said contact holes, respectively, and a measurement wiring in contact with said insulating surface; forming a conductive film electrically connected to said plurality of connecting wirings; forming a plurality of pixel electrodes by patterning said conductive film; forming an inspection conductive film electrically connected to a plurality of pixel electrodes and said measurement wiring; making said plurality of thin film transistors in an on state, measuring a value of electric current flowing in said measurement wiring, and judging whether or not said plurality of thin film transistors and said plurality of pixel electrodes are defective from said value; and removing said inspection conductive film. - View Dependent Claims (43, 44, 45, 46)
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47. A method of manufacturing of a display panel comprising a plurality of pixels each comprising a thin film transistor and a pixel electrode electrically connected to said thin film transistor, said method comprising steps of:
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making said thin film transistor in an on state, said thin film transistor electrically connected to a conductive film; measuring a value of electric current flowing in said conductive film; judging whether or not said thin film transistor is defective from said value; and forming a plurality of pixel electrodes by patterning said conductive film after said judging, wherein said judging is performed to said plurality of pixels in order. - View Dependent Claims (48, 49, 50, 51, 52, 53)
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54. A method manufacturing a display panel comprising a plurality of pixels each comprising a switching thin film transistor, an EL driver thin film transistor, a source signal line, a gate signal line, a power source supply line, and a pixel electrode electrically connected to said EL driver thin film transistor, said method comprising steps of:
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making said switching thin film transistor in an on state by controlling an electric potential of said gate signal line, making said EL driver thin film transistor in an on state by controlling an electric potential of said source signal line, and controlling an electric potential of said power source supply line, said EL driver thin film transistor electrically connected to a conductive film measuring a value of electric current flowing in said conductive film; judging whether or not said switching thin film transistor, said EL driver thin film transistor, said source signal line, said gate signal line, and said power source supply line are defective from said value; and forming a plurality of pixel electrodes by patterning said conductive film after said judging, wherein said judging is performed to said plurality of pixels in order. - View Dependent Claims (55, 56, 57, 58)
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59. A method of manufacturing a display panel comprising a plurality of pixels each comprising a first switching thin film transistor, a second switching thin film transistor, an EL driver thin film transistor, a source signal line, a first gate signal line, a second gate signal line, a power source supply line, and a pixel electrode electrically connected to said EL driver thin film transistor, said method comprising steps of:
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making said first switching thin film transistor in an on state by controlling an electric potential of said first gate signal line, making said EL driver thin film transistor in an on state by controlling an electric potential of said source signal line, and controlling an electric potential of said power source supply line, said EL driver thin film transistor electrically connected to a conductive film; measuring a first value of electric current flowing in said conductive film; making said second switching thin film transistor in an on state by controlling an electric potential of said second gate signal line and making said EL driver thin film transistor in an off state, before forming said pixel electrode by patterning a conductive film; measuring a second value of electric current flowing in said conductive film; judging whether or not said first switching thin film transistor, said second switching thin film transistor, said EL driver thin film transistor, said source signal line, said first gate signal line, said second gate signal line, and said power source supply line are defective from said first value and said second value; and forming a plurality of pixel electrodes by patterning said conductive film after said judging, wherein said judging is performed to said plurality of pixels in order. - View Dependent Claims (60, 61, 62, 63)
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64. A method of a manufacturing a display panel comprising a plurality of pixels each comprising a thin film transistor and a pixel electrode electrically connected to said thin film transistor, said method comprising steps of:
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connecting the pixel electrodes of said plurality of pixels electrically by an inspection conductive layer; making said thin film transistor in an on state; measuring a value of electric current flowing in said inspection conductive film; judging whether or not said thin film transistor is defective from said value; and removing said inspection conductive film after said judging is performed to said plurality of pixels in order. - View Dependent Claims (65, 66, 67, 68, 69, 70, 71)
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72. A method manufacturing a display panel comprising a plurality of pixels each comprising a switching thin film transistor, an EL driver thin film transistor, a source signal line, a gate signal line, a power source supply line, and a pixel electrode electrically connected to said EL driver thin film transistor, said method comprising steps of:
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connecting the pixel electrodes of said plurality of pixels electrically by an inspection conductive layer; making said switching thin film transistor in an on state by controlling an electric potential of said gate signal line, making said EL driver thin film transistor in an on state by controlling an electric potential of said source signal line, and controlling an electric potential of said power source supply line; measuring a value of electric current flowing in said inspection conductive film; judging whether or not said switching thin film transistor, said EL driver thin film transistor, said source signal line, said gate signal line, and said power source supply line are defective from said value; and removing said inspection conductive film after said judging is performed to said plurality of pixels in order. - View Dependent Claims (73, 74, 75, 76, 77)
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78. A method of manufacturing a display panel comprising a plurality of pixels each comprising a first switching thin film transistor, a second switching thin film transistor, an EL driver thin film transistor, a source signal line, a first gate signal line, a second gate signal line, a power source supply line, and a pixel electrode electrically connected to said EL driver thin film transistor, said method comprising steps of:
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connecting the pixel electrodes of said plurality of pixels electrically by an inspection conductive layer; making said first switching thin film transistor in an on state by controlling an electric potential of said first gate signal line, making said EL driver thin film transistor in an on state by controlling an electric potential of said source signal line, and controlling an electric potential of said power source supply line; measuring a first value of electric current flowing in said inspection conductive film; making said second switching thin film transistor in an on state by controlling an electric potential of said second gate signal line and making said EL driver thin film transistor in an off state; measuring a second value of electric current flowing in said inspection conductive film; judging whether or not said first switching thin film transistor, said second switching thin film transistor, said EL driver thin film transistor, said source signal line, said first gate signal line, said second gate signal line, and said power source supply line are defective from said first value and said second value, removing said inspection conductive film after said judging is performed to said plurality of pixels in order. - View Dependent Claims (79, 80, 81, 82, 83)
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84. A method of manufacturing a display panel, comprising steps of:
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forming a conductive film electrically connected to a first thin film transistor, a second thin film transistor, and a measurement wiring which are provided on an insulating surface; making said first thin film transistor and said second thin film transistor in an on state, measuring a value of electric current flowing in said measurement wiring, and judging whether or not said first thin film transistor and said second thin film transistor are defective from said value; and forming a first pixel electrode and a second pixel electrode by patterning said conductive film to be electrically connected to said first thin film transistor and said second thin film transistor, respectively after said judging. - View Dependent Claims (85, 86, 87, 88, 89)
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90. A method of manufacturing a display panel, comprising steps of:
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forming an interlayer insulating film to cover a first thin film transistor and a second thin film transistor provided on an insulating surface; forming contact holes in said interlayer insulating film; forming a first connecting wiring and a second connecting wiring respectively connected to each of source regions or drain regions of said first thin film transistor and said second thin film transistor through said contact holes, and a measurement wiring in contact with said insulating surface; forming a conductive film electrically connected to said first connecting wiring, said second connecting wiring and said measurement wiring; making said first thin film transistor and said second thin film transistor in an on state, measuring a value of electric current flowing in said measurement wiring, and judging whether or not said first thin film transistor and said second thin film transistor are defective from said value; and forming a first pixel electrode and a second pixel electrode by patterning said conductive film to be electrically connected to said first thin film transistor and said second thin film transistor, respectively after said judging. - View Dependent Claims (91, 92, 93, 94, 95)
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96. A method of manufacturing a display panel, comprising steps of:
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forming an inspection conductive film electrically connected to a first pixel electrode and a second pixel electrode electrically connected to a first thin film transistor and a second thin film transistor, respectively, and a measurement wiring, which are provided on an insulating surface; making said first thin film transistor and said second thin film transistor in an on state, measuring a value of electric current flowing in said measurement wiring, and judging whether or not said first thin film transistor and said second thin film transistor and said first pixel electrode and said second pixel electrode are defective from said value; and removing said inspection conductive film. - View Dependent Claims (97, 98, 99, 100, 101, 102)
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103. A method of manufacturing a display panel, comprising steps of:
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forming an interlayer insulating film to cover a first thin film transistor and a second thin film transistor provided on an insulating surface; forming contact holes in said interlayer insulating film; forming a first connecting wiring and a second connecting wiring respectively connected to each of source regions or drain regions of said first transistor and said second transistor through said contact holes, and a measurement wiring in contact with said insulating surface; forming a conductive film electrically connected to said first connecting wiring and said second connecting wiring; forming a first pixel electrode and a second pixel electrode electrically connected to said first thin film transistor and said second thin film transistor, respectively by patterning said conductive film; forming an inspection conductive film electrically connected to said first pixel electrode and said second pixel electrode and said measurement wiring; making said first thin film transistor and said second thin film transistor in an on state, measuring a value of electric current flowing in said measurement wiring, and judging whether or not said first thin film transistor and said second thin film transistor and said first pixel electrode and said second pixel electrode are defective from said value; and removing said inspection conductive film. - View Dependent Claims (104, 105, 106, 107, 108, 109)
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110. A display panel formed by a method of manufacturing the display panel, the method comprising steps of:
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forming a conductive film electrically connected to a first thin film transistor, a second thin film transistor, and a measurement wiring which are provided on an insulating surface; making said first thin film transistor and said second thin film transistor in an on state, measuring a value of electric current flowing in said measurement wiring, and judging whether or not said first thin film transistor and said second thin film transistor are defective from said value; and forming a first pixel electrode and a second pixel electrode by patterning said conductive film to be electrically connected to said first thin film transistor and said second thin film transistor, respectively. - View Dependent Claims (111, 112, 113, 114)
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115. A display panel formed by a method of manufacturing the display panel, the method comprising steps of:
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forming an interlayer insulating film to cover a first thin film transistor and a second thin film transistor provided on an insulating surface; forming contact holes in said interlayer insulating film; forming a first connecting wiring and a second connecting wiring respectively connected to each of source regions or drain regions of said first thin film transistor and said second thin film transistor through said contact holes, and a measurement wiring in contact with said insulating surface; forming a conductive film electrically connected to said first connecting wiring, said second connecting wiring and said measurement wiring; making said first thin film transistor and said second thin film transistor in an on state, measuring a value of electric current flowing in said measurement wiring, and judging whether or not said first thin film transistor and said second thin film transistor are defective from said value; and forming a first pixel electrode and a second pixel electrode by patterning said conductive film to be electrically connected to said first thin film transistor and said second thin film transistor, respectively. - View Dependent Claims (116, 117, 118, 119)
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120. A display panel formed by a method of manufacturing the display panel, the method comprising steps of:
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forming an inspection conductive film electrically connected to a first pixel electrode and a second pixel electrode electrically connected to a first thin film transistor and a second thin film transistor, respectively, and a measurement wiring, which are provided on an insulating surface; making said first thin film transistor and said second thin film transistor in an on state, measuring a value of electric current flowing in said measurement wiring, and judging whether or not said first thin film transistor and said second thin film transistor and said first pixel electrode and said second pixel electrode are defective from said value; and removing said inspection conductive film. - View Dependent Claims (121, 122, 123, 124)
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125. A display panel formed by a method of manufacturing a display panel, comprising steps of:
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forming an interlayer insulating film to cover a first thin film transistor and a second thin film transistor provided on an insulating surface; forming contact holes in said interlayer insulating film; forming a first connecting wiring and a second connecting wiring respectively connected to each of source regions or drain regions of said first transistor and said second transistor through said contact holes, and a measurement wiring in contact with said insulating surface; forming a conductive film electrically connected to said first connecting wiring and said second connecting wiring; forming a first pixel electrode and a second pixel electrode electrically connected to said first thin film transistor and said second thin film transistor, respectively by patterning said conductive film; forming an inspection conductive film electrically connected to said first pixel electrode and said second pixel electrode and said measurement wiring; making said first thin film transistor and said second thin film transistor in an on state, measuring a value of electric current flowing in said measurement wiring, and judging whether or not said first thin film transistor and said second thin film transistor and said first pixel electrode and said second pixel electrode are defective from said value; and removing said inspection conductive film. - View Dependent Claims (126, 127, 128, 129)
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Specification
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Current AssigneeSemiconductor Energy Laboratory Co., Ltd.
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Original AssigneeSemiconductor Energy Laboratory Co., Ltd.
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InventorsArai, Yasuyuki, Koyama, Jun, Yamazaki, Shunpei
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Primary Examiner(s)Smith; Zandra V.
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Assistant Examiner(s)Perkins; Pamela E
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Application NumberUS09/873,447Publication NumberTime in Patent Office2,107 DaysField of Search438/15, 438/17, 438/149, 438/154, 438/155, 438/157US Class Current438/17CPC Class CodesG09G 2300/0842 forming a memory circuit, e...G09G 3/006 Electronic inspection or te...G09G 3/3225 using an active matrixH01L 27/1214 comprising a plurality of T...H01L 27/1259 Multistep manufacturing met...H10K 59/12 Active-matrix OLED [AMOLED]...
