System and method for acquiring semiconductor process status information
First Claim
1. A system for acquiring semiconductor process status information, comprising:
- an equipment server for sending a start command according to a first protocol;
a computer system server connected to the equipment server for converting the start command from the first protocol to a second protocol and outputting the converted start command;
a protocol converter connected to the computer system server for converting the start command from the second protocol to a third protocol and outputting the converted command according to the third protocol;
an AD/DA module connected to the protocol converter for converting the start command from the third protocol to an analog signal and outputting the converted command;
an external sensor connected to the AD/DA module for acquiring semiconductor process status information as initiated by the start command;
wherein the AD/DA module converts the semiconductor process status information from analog signals to the third protocol and outputs the converted information to the protocol converter;
the protocol converter converts the semiconductor process status information from the third protocol to the second protocol and outputs the converted information to the computer system server; and
the computer system server outputs the converted information to the equipment server.
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Abstract
A system for acquiring semiconductor process status information. An equipment server outputs a start command according to a HSMS protocol to a computer system server, which converts the start command from the HSMS protocol to a RS232 protocol and outputs the converted command to a protocol converter. The protocol converter converts the start command from the RS232 protocol to a RS485 protocol and outputs the converted command to an AD/DA module. The AD/DA module converts the start command from the RS485 command to an analog signal and outputs the converted command to an external sensor, which acquires semiconductor equipment status information as initiated by the start command. The acquired status information is then sent on a reverse path to the start command, undergoing successive conversion and output until reaching the equipment server.
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Citations
18 Claims
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1. A system for acquiring semiconductor process status information, comprising:
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an equipment server for sending a start command according to a first protocol; a computer system server connected to the equipment server for converting the start command from the first protocol to a second protocol and outputting the converted start command; a protocol converter connected to the computer system server for converting the start command from the second protocol to a third protocol and outputting the converted command according to the third protocol; an AD/DA module connected to the protocol converter for converting the start command from the third protocol to an analog signal and outputting the converted command; an external sensor connected to the AD/DA module for acquiring semiconductor process status information as initiated by the start command; wherein the AD/DA module converts the semiconductor process status information from analog signals to the third protocol and outputs the converted information to the protocol converter;
the protocol converter converts the semiconductor process status information from the third protocol to the second protocol and outputs the converted information to the computer system server; and
the computer system server outputs the converted information to the equipment server. - View Dependent Claims (2, 3, 4, 5, 6)
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7. A system for acquiring semiconductor process status information, comprising:
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an equipment server for outputting a start command according to a HSMS protocol; a computer system server connected to the equipment server for converting the start command from the HSMS protocol to a RS232 protocol and outputting the converted command; a protocol converter connected to the computer system server for converting the start command from the RS232 protocol to a RS485 protocol and outputting the converted command; an AD/DA module connected to the protocol converter for converting the start command from the RS485 command to an analog signal and outputting the converted command; an external sensor connected to the AD/DA module for acquiring semiconductor process status information as initiated by the start command; wherein the AD/DA module converts the semiconductor process status information from analog signals to the RS485 protocol and outputs the converted information to the protocol converter;
the protocol converter converts the semiconductor process status information from the RS485 protocol to the RS232 protocol and outputs the converted information to the computer system server; and
the computer system server outputs the semiconductor process status information to the equipment server. - View Dependent Claims (8, 9, 10, 11, 12)
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13. A method for acquiring semiconductor process status information, comprising the steps of:
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a tool application program outputting a start command according to a HSMS protocol; converting the start command from the HSMS protocol to a RS232 protocol and outputting the converted start command; converting the start command from the RS232 protocol to a RS485 protocol and outputting the converted command according to the RS485 protocol; converting the start command from the RS485 protocol to an analog signal and outputting the converted command; activation of an external sensor by the start command; acquiring semiconductor process status information from the external sensor; converting the semiconductor process status information from analog signals to the RS485 protocol and outputting the converted information according to the RS485 protocol; converting the semiconductor process status information from the RS485 protocol to the RS232 protocol and outputting the converted information according to the RS232 protocol; converting the semiconductor process status information from the RS232 protocol to the HSMS protocol; and outputting the semiconductor process status information to an equipment server according to the HSMS protocol. - View Dependent Claims (14, 15, 16, 17, 18)
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Specification