Chemical vapor deposition apparatus

• US 7,217,326 B2
• Filed: 12/31/2003
• Issued: 05/15/2007
• Est. Priority Date: 04/14/2003
• Status: Expired due to Term

• Current Assignee: Samsung Display Company Limited (Samsung Group)
• Original Assignee: Samsung Electronics Co. Ltd. (Samsung Group)
• Inventors: Lee, Ho
• Primary Examiner(s): LUND, JEFFRIE ROBERT
• Application Number:
  US10/750,023
• Publication Number:
  US 20040200413A1
• Time in Patent Office: 1,231 Days
• Field of Search: 118/715, 156/345.33, 156/345.34
• US Class Current: 118/715
• CPC Class Codes: C23C 16/455 characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
• CPC Class Codes: C23C 16/45565 Shower nozzles
• CPC Class Codes: C23C 16/45591 Fixed means, e.g. wings, baffles
• CPC Class Codes: C23C 16/5096 Flat-bed apparatus

Abstract

A chemical vapor deposition apparatus is provided, which includes: a chamber having an inner space; a gas feed member for supplying a gas into the chamber; a susceptor disposed in the chamber and supporting a substrate; a diffuser partitioning the inner space of the chamber into first and second partitions and having a plurality of holes connecting the first partition and the second partition for gas communication; a diffuser frame incorporated into the diffuser; and an insulating frame disposed between the chamber and the diffuser.

Claims

1. A chemical vapor deposition apparatus comprising:

a chamber having an inner space and top, bottom, and side wall;

a susceptor disposed in the chamber and supporting a substrate;

a diffuser partitioning the inner space of the chamber into first and second partitions and having an extension extended out from a boundary, wherein the extension of the diffuser is exposed to the inner space of the chamber; and

an insulating frame disposed between the side wall of the chamber and the diffuser, said insulating frame being disposed on an upper side of the extension of the diffuser and extending to and contacting the side wall of the chamber.

2. The apparatus of claim 1, wherein the extension of the diffuser has an “

L”

shape.

3. The apparatus of claim 1, wherein the diffuser comprises Al or stainless steel.

4. The apparatus of claim 1, wherein the insulating frame comprises ceramic.

5. The apparatus of claim 1, wherein the substrate comprises glass.

6. The apparatus of claim 1, wherein the substrate is prepared for a liquid crystal display.

7. The apparatus of claim 1, further comprising a blocking member for mixing and spreading the gas from the gas feed member before the gas passes through the holes of the diffuser.

8. The apparatus of claim 1, wherein the diffuser is electrically powered and the susceptor is electrically grounded.

9. The apparatus of claim 1, further comprising:

a gas feed member for supplying a gas into the chamber.

10. The apparatus of claim 1, wherein the extension overlaps a surface of the insulating frame facing the susceptor.

11. A chemical vapor deposition apparatus comprising:

a chamber having an inner space and top, bottom, and side wall;

a susceptor disposed in the chamber and supporting a substrate;

a diffuser partitioning the inner space of the chamber into first and second partitions and having an extension of an “

L”

shape extended out from a boundary, wherein the extension of the diffuser is exposed to the inner space of the chamber; and

an insulating frame disposed between the side wall of the chamber and the diffuser, said insulating frame being disposed on an upper side of the extension of the diffuser and extending to and contacting the side wall of the chamber.

12. The apparatus of claim 11, wherein the extension overlaps a surface of the insulating frame facing the susceptor.