Chemical vapor deposition apparatus
First Claim
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1. A chemical vapor deposition apparatus comprising:
- a chamber having an inner space and top, bottom, and side wall;
a susceptor disposed in the chamber and supporting a substrate;
a diffuser partitioning the inner space of the chamber into first and second partitions and having an extension extended out from a boundary, wherein the extension of the diffuser is exposed to the inner space of the chamber; and
an insulating frame disposed between the side wall of the chamber and the diffuser, said insulating frame being disposed on an upper side of the extension of the diffuser and extending to and contacting the side wall of the chamber.
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Abstract
A chemical vapor deposition apparatus is provided, which includes: a chamber having an inner space; a gas feed member for supplying a gas into the chamber; a susceptor disposed in the chamber and supporting a substrate; a diffuser partitioning the inner space of the chamber into first and second partitions and having a plurality of holes connecting the first partition and the second partition for gas communication; a diffuser frame incorporated into the diffuser; and an insulating frame disposed between the chamber and the diffuser.
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Citations
12 Claims
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1. A chemical vapor deposition apparatus comprising:
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a chamber having an inner space and top, bottom, and side wall; a susceptor disposed in the chamber and supporting a substrate; a diffuser partitioning the inner space of the chamber into first and second partitions and having an extension extended out from a boundary, wherein the extension of the diffuser is exposed to the inner space of the chamber; and an insulating frame disposed between the side wall of the chamber and the diffuser, said insulating frame being disposed on an upper side of the extension of the diffuser and extending to and contacting the side wall of the chamber. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10)
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11. A chemical vapor deposition apparatus comprising:
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a chamber having an inner space and top, bottom, and side wall; a susceptor disposed in the chamber and supporting a substrate; a diffuser partitioning the inner space of the chamber into first and second partitions and having an extension of an “
L”
shape extended out from a boundary, wherein the extension of the diffuser is exposed to the inner space of the chamber; andan insulating frame disposed between the side wall of the chamber and the diffuser, said insulating frame being disposed on an upper side of the extension of the diffuser and extending to and contacting the side wall of the chamber. - View Dependent Claims (12)
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Specification