Post-release capacitance enhancement in micromachined devices and a method of performing the same
First Claim
1. An improvement in a MEMS device for capacitive enhancement comprising:
- a capacitive assembly having two sets of interdigitated fingers fabricated initially in a noninterdigitated configuration;
a movable stage to which one of the two sets of interdigitated fingers are coupled;
an actuator for selectively moving the stage from an initial position to a post-release position in which the two sets of interdigitated fingers are interdigitated with each other; and
a lock for maintaining the stage in the post-release position.
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Abstract
A MEMS device which utilizes a capacitive sensor or actuator is enhancement by initially fabricating the capacitive assembly which comprises the sensor or actuator as two sets of interdigitated fingers in a noninterdigitated configuration. One of the two sets of fingers is coupled to a movable stage. The stage is moved from an initial position to a post-release position in which the two sets of interdigitated fingers are interdigitated with each other. The stage is carried by two pairs flexures which maintain the stability of motion of the stage and when in the post-release position provide stiffness which prevents deflection of the set of fingers coupled to the stage. The stage and hence the assembled sets of fingers are then locked into the post-release position.
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Citations
18 Claims
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1. An improvement in a MEMS device for capacitive enhancement comprising:
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a capacitive assembly having two sets of interdigitated fingers fabricated initially in a noninterdigitated configuration; a movable stage to which one of the two sets of interdigitated fingers are coupled; an actuator for selectively moving the stage from an initial position to a post-release position in which the two sets of interdigitated fingers are interdigitated with each other; and a lock for maintaining the stage in the post-release position. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9)
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10. An improvement in a method of assembling a MEMS device to provide capacitive enhancement comprising:
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initially fabricating a capacitive assembly having two sets of interdigitated fingers in a noninterdigitated configuration; moving a stage to which one of the two sets of interdigitated fingers are coupled from an initial position to a post-release position in which the two sets of interdigitated fingers are interdigitated with each other; and locking the stage in the post-release position. - View Dependent Claims (11, 12, 13, 14, 15, 16, 17, 18)
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Specification