Spatial light modulator with perforated hinge
First Claim
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1. A spatial light modulator, comprising:
- a reflecting surface;
one or more electrodes; and
a perforated hinge coupled to the reflecting surface to allow rotation of the reflecting surface towards the one or more electrodes wherein the perforated hinge includes an elongated body having holes therein.
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Abstract
A spatial light modulator (SLM) is disclosed that increases speed and efficiency of an SLM through the use of a perforated hinge. The hinge may take many forms, but generally includes an elongated body having holes therein along its longitudinal direction. One or more electrodes are charged with a predetermined voltage in order rotate a reflecting surface towards the electrodes through electrostatic attraction. The perforations within the hinge results in the hinge being made from less material so that it is less sensitive to hinge thickness variations that can occur during the manufacturing process. Consequently, the perforated hinge allows for more stable, uniform mirror rotation.
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Citations
29 Claims
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1. A spatial light modulator, comprising:
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a reflecting surface; one or more electrodes; and a perforated hinge coupled to the reflecting surface to allow rotation of the reflecting surface towards the one or more electrodes wherein the perforated hinge includes an elongated body having holes therein. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15)
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16. A spatial light modulator comprising:
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a perforated hinge including a body having a length (L) and a width (W), the body having two side walls defining the width with at least two holes positioned therein between the two side walls; at least one support post coupled to the perforated hinge; and a reflecting surface mounted on the support post. - View Dependent Claims (17, 18, 19, 20)
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21. A spatial light modulator, comprising:
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a reflecting surface; one or more electrodes; a perforated hinge coupled to the reflecting surface to allow rotation of the reflecting surface towards the one or more electrodes; and a spatial light modulator body having the one or more electrodes and opposing supports mounted thereto, the perforated hinge mounted to the opposing supports. - View Dependent Claims (22)
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23. A spatial light modulator, comprising:
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a reflecting surface; one or more electrodes; a perforated hinge coupled to the reflecting surface to allow rotation of the reflecting surface towards the one or more electrodes; and one or more spring fingers positioned between the reflecting surface and the electrodes to prevent contact there between.
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24. A spatial light modulator, comprising:
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a reflecting surface; one or more electrodes; and a perforated hinge coupled to the reflecting surface to allow rotation of the reflecting surface towards the one or more electrodes, wherein the perforated hinge includes at least two, spaced-apart longitudinal members parallel to an axis of rotation of the reflecting surface. - View Dependent Claims (25)
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26. A spatial light modulator, comprising:
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a reflecting surface; one or more electrodes; and a perforated hinge coupled to the reflecting surface to allow rotation of the reflecting surface towards the one or more electrodes, wherein the perforated hinge includes two longitudinal sidewalls with two or more geometrical perforations positioned between the sidewalls.
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27. A spatial light modulator, comprising:
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a reflecting surface; one or more electrodes; and a perforated hinge coupled to the reflecting surface to allow rotation of the reflecting surface towards the one or more electrodes, wherein the perforated hinge includes two, equal-length longitudinal sidewalls forming a width there between of the perforated hinge, wherein the width of the hinge varies along its length.
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28. A spatial light modulator, comprising:
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a reflecting surface; one or more electrodes; and a perforated hinge coupled to the reflecting surface to allow rotation of the reflecting surface towards the one or more electrodes, wherein the perforated hinge is made of material whose fatigue lifetime exceeds 1.0e9 hinge deflection cycles and wherein the perforated hinge twists in response to voltage applied to the one or more electrodes.
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29. A spatial light modulator, comprising:
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a reflecting surface; one or more electrodes; and a perforated hinge coupled to the reflecting surface to allow rotation of the reflecting surface towards the one or more electrodes, wherein the perforated hinge is mounted to the reflecting surface along an edge of the reflecting surface or below the reflecting surface and wherein the perforated hinge twists in response to voltage applied to the one or more electrodes.
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Specification