Spatial light modulator with perforated hinge
First Claim
1. A spatial light modulator, comprising:
- a reflecting surface;
one or more electrodes; and
a perforated hinge coupled to the reflecting surface to allow rotation of the reflecting surface towards at least one of the electrodes.
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Abstract
A spatial light modulator (SLM) is disclosed that increases speed and efficiency of an SLM through the use of a perforated hinge. The hinge may take many forms, but generally includes an elongated body having holes therein along its longitudinal direction. One or more electrodes are charged with a predetermined voltage in order rotate a reflecting surface towards the electrodes through electrostatic attraction. The perforations within the hinge results in the hinge being made from less material so that it is less sensitive to hinge thickness variations that can occur during the manufacturing process. Consequently, the perforated hinge allows for more stable, uniform mirror rotation.
25 Citations
20 Claims
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1. A spatial light modulator, comprising:
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a reflecting surface;
one or more electrodes; and
a perforated hinge coupled to the reflecting surface to allow rotation of the reflecting surface towards at least one of the electrodes. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16)
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17. A spatial light modulator comprising:
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a perforated hinge including a body having a length (L) and a width (W), the body having two side walls defining the width with at least two holes positioned therein between the two side walls;
at least one support post coupled to the perforated hinge; and
a reflecting surface mounted on the support post. - View Dependent Claims (18, 19)
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20. A spatial light modulator, comprising:
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a perforated hinge member having an elongated body with geometrically-shaped holes extending through the elongated body; and
a reflecting surface coupled to the perforated hinge.
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Specification