Ultra thin body fully-depleted SOI MOSFETs
First Claim
1. A silicon-on-insulator (SOI) metal oxide semiconductor field effect transistor (MOSFET) comprising:
- a silicon-on-insulator (SOI) substrate having a SOI layer in which a first portion thereof has a thickness of less than about 20 nm;
a gate including a gate dielectric and a gate electrode located atop the first portion of the SOI layer having said thickness, said gate electrode having an upper surface and a bottom surface that have the same length or said bottom surface has a length that is greater than the upper surface; and
source and drain diffusion regions located in a second portion of the SOI layer that is adjacent to said first portion, said second portion of the SOI layer is thicker than the first portion.
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Accused Products
Abstract
Ultra thin body fully-depleted silicon-on-insulator (SOI) metal-oxide-semiconductor field-effect-transistors (MOSFETs) in which the SOI thickness changes with gate-length variations thereby minimizing the threshold voltage variations that are typically caused by SOI thickness and gate-length variations are provided. Such a SOI MOSFET may include a SOI substrate having a SOI layer in which a first portion thereof has a thickness of less than 20 nm; a gate including a gate dielectric and a gate electrode located atop the first portion of the SOI layer having the thickness, the gate electrode having an upper surface and a bottom surface that have the same length or the bottom surface has a length that is greater than the upper surface; and source and drain diffusion regions located in a second portion of the SOI layer that is adjacent to the first portion, and the second portion of the SOI layer is thicker than the first portion.
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Citations
18 Claims
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1. A silicon-on-insulator (SOI) metal oxide semiconductor field effect transistor (MOSFET) comprising:
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a silicon-on-insulator (SOI) substrate having a SOI layer in which a first portion thereof has a thickness of less than about 20 nm; a gate including a gate dielectric and a gate electrode located atop the first portion of the SOI layer having said thickness, said gate electrode having an upper surface and a bottom surface that have the same length or said bottom surface has a length that is greater than the upper surface; and source and drain diffusion regions located in a second portion of the SOI layer that is adjacent to said first portion, said second portion of the SOI layer is thicker than the first portion. - View Dependent Claims (2, 3, 4, 5, 6)
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- 7. A semiconductor structure comprising a plurality of fully-depleted metal oxide semiconductor field effect transistors (MOSFETs) located on a top Si-containing layer of a silicon-on-insulator substrate, wherein said top Si-containing layer under each MOSFET has a thickness that varies depending upon a gate length of each MOSFET, and each of said MOSFETS includes a gate electrode having an upper surface and a bottom surface that have the same length or said bottom surface has a length that is greater than the upper surface.
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15. A silicon-on-insulator (SOI) metal oxide semiconductor field effect transistor (MOSFET) comprising:
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a silicon-on-insulator (SOI) substrate having a SOI layer in which a first portion thereof has a thickness of less than about 20 nm, said SOI layer is located on a surface of a buried oxide having a thickness from 100 nm to about 1000 nm; a gate including a gate dielectric and a gate electrode located atop the first portion of the SOI layer having said thickness, said gate electrode having an upper surface and a bottom surface that have the same length or said bottom surface has a length that is greater than the upper surface; source and drain diffusion regions located in a second portion of the SOI layer that is adjacent to said first portion, said second portion of the SOI layer is thicker than the first portion; and an outer insulating spacer about the gate, said outer insulating spacer having an upper surface portion that is coplanar to the upper surface of said gate electrode, and is spaced apart from a vertical sidewall of said gate electrode by said gate dielectric. - View Dependent Claims (16, 17, 18)
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Specification