Process for manufacturing microelectronic, microoptoelectronic or micromechanical devices

• US 7,534,658 B2
• Filed: 02/25/2005
• Issued: 05/19/2009
• Est. Priority Date: 07/20/2001
• Status: Expired due to Term

• Current Assignee: SAES Getters SpA (SAES Getters S)
• Original Assignee: SAES Getters SpA (SAES Getters S)
• Inventors: Amiotti, Marco
• Primary Examiner(s): POTTER, ROY KARL
• Application Number:
  US11/067,526
• Publication Number:
  US 20050158914A1
• Time in Patent Office: 1,544 Days
• Field of Search: 438/115, 438/125, 257/682, 252/194
• US Class Current: 438/115
• CPC Class Codes: B81C 1/00285 using materials for controlling the level of pressure, contaminants or moisture inside of the package, e.g. getters
• CPC Class Codes: C23C 14/04 Coating on selected surface areas, e.g. using masks
• CPC Class Codes: C23C 16/04 Coating on selected surface areas, e.g. using masks
• CPC Class Codes: G01J 5/045 Sealings; Vacuum enclosures; Encapsulated packages; Wafer bonding structures; Getter arrangements getter arrangements per se H01L23/26 and H01L21/3221
• CPC Class Codes: H01L 21/6835 using temporarily an auxiliary support
• CPC Class Codes: H01L 23/26 including materials for absorbing or reacting with moisture or other undesired substances , e.g. getters
• CPC Class Codes: H01L 2924/00 Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
• CPC Class Codes: H01L 2924/0002 Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00
• CPC Class Codes: H01L 2924/09701 Low temperature co-fired ceramic [LTCC]

Abstract

The specification teaches a technique for manufacturing microelectronic, microoptoelectronic or micromechanical devices (microdevices) in which a contaminant absorption layer improves the life and operation of the microdevice. In an embodiment, a process for manufacturing the devices includes efficiently integrating a getter material.

Claims

1. A process for manufacturing a device for use in the production of a microdevice including the steps of:

creating a support device by deposing discrete deposits of contaminant removing material on a base layer of a material selected from the group consisting of glasses, ceramics, semiconductors and metals, wherein said contaminant removing material is selected among the group of materials consisting of getter materials and drier materials;

covering said contaminant removing material by a manufacturing layer, wherein said manufacturing layer is a substrate layer which may be used in the manufacture of said microdevice;

removing selected materials in said manufacturing layer creating a passage in said manufacturing layer, such that said contaminant removing material is exposed to atmosphere, wherein said passages create; and

attaching said support device such that it covers operational parts of said microdevice and a seal is created at the periphery of said cavity by said support device and said microdevice, whereby said operational parts are placed in said cavity from removed layer of manufacturing material.

2. The process as recited in claim 1, further comprised of the step of storing said covered support device in an inert atmosphere prior to use.

3. A process comprising:

creating a support device by deposing discrete deposits of contaminant removing material at a thickness of between about 0.1 to 5 μ

m on a base layer of a material selected from the group consisting of glasses, ceramics, semiconductors and metals, wherein said contaminant removing material is selected among the group of materials consisting of getter materials and drier materials;

covering said contaminant removing material by a manufacturing layer, wherein said manufacturing layer is a substrate layer which may be used in the manufacture of a microdevice;

removing selected portions of said manufacturing layer creating a passage in said manufacturing layer, such that said contaminant removing material is exposed to atmosphere, wherein said passages create cavities.

4. The process as recited in claim 3, further comprising:

attaching said support device, wherein the support device covers operational parts of said microdevice;

creating a seal around the periphery of one of said cavities, wherein said cavity is at least partially defined by said support device and said microdevice;

removing one or more layers of manufacturing material, wherein operational parts are placed in one of said cavity from the removed layers of manufacturing material.

5. The process as recited in claim 3, further comprising storing said covered support device in an inert atmosphere prior to use.

6. The process as recited in claim 3, further comprising configuring the base layer with one or more hollows fitted to comprise said discrete deposits of contaminant removing material.

7. The process as recited in claim 3, further comprising forming the manufacturing layer to a thickness of between about 1 to 20 μ

m.

8. A method for providing multiple microdevices comprising:

forming a first base, including a plurality of microdevice bases, where each microdevice base is provided with at least one component;

forming a second base, including a plurality of covers, where each cover is provided with a recess holding getter material;

juxtaposing the first base and the second base to form a compound structure;

separating the microdevices from the compound structure.

9. The method of claim 8, further comprising forming at least one hollow in the first base, wherein the at least one component is formed in the at least one hollow.

10. The method of claim 8, further comprising forming at least one hollow in the second base, wherein the getter material is formed in the at least one hollow.

11. The method of claim 8, further comprising exposing the at least one component and the getter material to an atmospheric environment of a cavity at least partially defined by the first base and the second base.

12. The method of claim 8, further comprising:

forming on the second base a layer of a material compatible with the production of microelectronic or micromechanical devices or parts thereof

forming passages in the layer, wherein the passages facilitate atmospheric contact between the getter material and an atmospheric environment of the at least one component.

13. A method comprising:

forming a base, including a plurality of covers, where each cover is provided with a recess holding getter material;

forming on the base a production process-compatible layer of a material compatible with the production of microelectronic or micromechanical devices or parts thereof;

providing the base in a production process in which passages are formed in the production process-compatible layer.

14. The method of claim 13, wherein the base is a first base, further comprising:

forming a second base, including a plurality of microdevice bases, where each microdevice base is provided with at least one component;

engaging the first base with the second base.

15. The method of claim 14, further comprising forming a component of the microdevice on the second base, wherein, when engaging the first base with the second base, the component of the microdevice is located within a cavity at least partially defined by a recess holding getter material.

16. The method of claim 14, forming passages in the production process-compatible layer, wherein the passages facilitate contact between the getter material and an atmospheric environment of the at least one component.

17. The method of claim 13, further comprising forming the getter material in each cover of the base.

18. The method of claim 13, further comprising forming the getter material to a thickness of between about 0.1 to 5 μ

m.

19. The method of claim 13, further comprising forming the production process layer to a thickness of between about 1 to 20 μ

m.

20. A process comprising:

creating a support device by deposing discrete deposits of contaminant removing material on a base layer of a material selected from the group consisting of glasses, ceramics, semiconductors and metals, wherein said contaminant removing material is selected among the group of materials consisting of getter materials and drier materials;

covering said contaminant removing material by a manufacturing layer to a thickness of between about 1 to 20 μ

m, wherein said manufacturing layer is a substrate layer which may be used in the manufacture of said microdevice; and

removing selected portions of said manufacturing layer creating a passage in said manufacturing layer, such that said contaminant removing material is exposed to atmosphere, wherein said passages create cavities.

21. The process as recited in claim 20, further comprising:

attaching said support device, wherein the support device covers operational parts of said microdevice;

creating a seal around the periphery of one of said cavities, wherein said cavity is at least partially defined by said support device and said microdevice;

removing one or more layers of manufacturing material, wherein operational parts are placed in one of said cavity from the removed layers of manufacturing material.

22. The process as recited in claim 20, further comprising storing said covered support device in an inert atmosphere prior to use.

23. The process as recited in claim 20, further comprising configuring the base layer with one or more hollows fitted to comprise said discrete deposits of contaminant removing material.

24. A method for providing multiple microdevices comprising:

forming a first base, including a plurality of microdevice bases, where each microdevice base is provided with at least one microdevice component;

forming a second base, including a plurality of covers, where each cover is provided with a recess;

depositing contaminant removing material into each recess of each cover, wherein said contaminant removing material is selected among the group of materials consisting of getter materials and drier materials;

juxtaposing the first base and the second base to form a compound structure; and

separating the microdevices from the compound structure.

25. A method for providing multiple microdevices comprising:

forming a first base, including a plurality of microdevice bases, where each microdevice is provided with at least one microdevice component;

forming a second base, including a plurality of covers, where each cover is provided with a recess;

depositing contaminant removing material in a thickness of between about 0.1 to 5 μ

m into each recess of each cover, wherein said contaminant removing material is selected among the group of materials consisting of getter materials and drier materials;

juxtaposing the first base and the second base to form a compound structure; and

separating the microdevices from the compound structure.

26. A method for providing multiple microdevices comprising:

forming a first wafer, including a plurality of microdevice bases, where each microdevice is provided with at least one microdevice component;

forming a second wafer, including a plurality of covers, where each cover is provided with a recess;

depositing contaminant removing material into each recess of each cover, wherein said contaminant removing material is selected among the group of materials consisting of getter materials and drier materials;

fixing together the first wafer and the second wafer to form a compound structure; and

separating the microdevices from the compound structure.

27. A method of providing multiple microdevices comprising:

forming a first wafer, including a plurality of microdevice bases, where each microdevice base is provided with at least one microdevice component;

forming a second wafer, including a plurality of covers, where each cover is provided with a recess;

depositing contaminant removing material in a thickness of between about 0.1 to 5 μ

m into each recess of each cover, wherein said contaminant removing material is selected among the group of materials consisitng of getter materials and drier materials;

fixing together the first wafer and the second wafer to form a compound structure; and

separating the microdevices from the compound structure.

28. A method for providing multiple microdevices comprising:

forming a first wafer, including a plurality of microdevice bases, where each microdevice base is provided with at least one microdevice component;

forming a second wafer, including a plurality of covers, where each cover is provided with a recess;

depositing contaminant removing material into each recess of each cover through the use of selective deposition, wherein said contaminant removing material is selected among the group of materials consisting of getter materials and drier materials;

fixing together the first wafer and the second wafer to form a compound structure; and

separating the microdevices from the compound structure.

29. A method for providing multiple microdevices comprising:

forming a first wafer, including a plurality of microdevice bases, where each microdevice base is provided with at least one microdevice component;

forming a second wafer, including a plurality of covers, where each cover is provided with a recess;

depositing contaminant removing material into each recess of each cover through the use of sputtering, wherein said contaminant removing material is selected among the group of materials consisting of getter materials and drier materials; and

fixing together the first wafer and the second wafer to form a compound structure;

separating the microdevices from the compound structure.