Surface position measuring method and surface position measuring device
First Claim
Patent Images
1. A surface position measuring method comprising:
- a detection step of detecting an area of a spectrum of unforced thermal oscillation of a cantilever having a probe; and
an evaluation step of evaluating a position of a sample surface from a contact position between the probe and the sample surface measured based on change of the detected area of the spectrum of unforced thermal oscillation of the cantilever.
1 Assignment
0 Petitions
Accused Products
Abstract
A surface position measuring method capable of measuring a position on a soft surface accurately and rapidly (real time), with low invasiveness. The method comprises the steps of measuring the spectrum of thermal oscillation of a cantilever with the distance between a cantilever tip and a sample surface being changed, extracting a fundamental mode component (spectrum area) from the obtained spectrum of thermal oscillation, and measuring a change in the spectrum area of thermal oscillation (spectrum area) with respect to the distance. A position at which the area of the cantilever thermal oscillation spectrum begins to change is evaluated as a position on the sample surface.
-
Citations
6 Claims
-
1. A surface position measuring method comprising:
-
a detection step of detecting an area of a spectrum of unforced thermal oscillation of a cantilever having a probe; and an evaluation step of evaluating a position of a sample surface from a contact position between the probe and the sample surface measured based on change of the detected area of the spectrum of unforced thermal oscillation of the cantilever. - View Dependent Claims (2, 3, 4)
-
-
5. A surface position measuring apparatus comprising:
-
a detection section that detects an area of a spectrum of unforced thermal oscillation of a cantilever having a probe; and an evaluation section that evaluates a position of a sample surface from a contact position between the probe and the sample surface measured based on change of the area of the spectrum of unforced thermal oscillation of the cantilever detected by the detection section. - View Dependent Claims (6)
-
Specification