Surface Position Measuring Method And Surface Position Measuring Device
1 Assignment
0 Petitions
Accused Products
Abstract
A surface position measuring method capable of measuring a position on a soft surface accurately and rapidly (real time), with low invasiveness. The method comprises the steps of measuring the spectrum of thermal oscillation of a cantilever with the distance between a cantilever tip and a sample surface being changed, extracting a fundamental mode component (spectrum area) from the obtained spectrum of thermal oscillation, and measuring a change in the spectrum area of thermal oscillation (spectrum area) with respect to the distance. A position at which the area of the cantilever thermal oscillation spectrum begins to change is evaluated as a position on the sample surface.
8 Citations
10 Claims
-
1-6. -6. (canceled)
-
7. A surface position measuring method comprising:
-
a detection step of detecting an area of a spectrum of thermal oscillation of a cantilever having a probe; and
an evaluation step of evaluating a position of a sample surface from a contact position between the probe and the sample surface measured based on change of the detected area of the spectrum of thermal oscillation of the cantilever. - View Dependent Claims (8, 9)
-
-
10. A surface position measuring apparatus comprising:
-
a detection section that detects an area of a spectrum of thermal oscillation of a cantilever having a probe; and
an evaluation section that evaluates a position of a sample surface from a contact position between the probe and the sample surface measured based on change of the area of the spectrum of thermal oscillation of the cantilever detected by the detection section.
-
Specification