Plate member, substrate holding device, exposure apparatus and method, and device manufacturing method
First Claim
1. A substrate holding device which holds a substrate to be exposed through a liquid, comprising:
- a holder which holds the substrate;
a predetermined surface which faces a side surface of the substrate held on the holder via a predetermined gap and is liquid-repellent; and
a chamfered portion formed on an upper portion of the predetermined surface, wherein;
the side surface of the substrate is provided with a liquid-repellent area which is liquid-repellent, andthe chamfered portion is provided to face the liquid-repellent area of the substrate held on the holder.
1 Assignment
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Accused Products
Abstract
A substrate holder PH includes a first holder PH1 which holds a substrate P, a liquid-repellent inner surface Tc of a plate member T which faces a side surface Pc of the substrate P held on the first holder PH1 via a predetermined gap A, and a chamfered portion C provided on an upper portion of the inner surface Tc. On the side surface Pc of the substrate P, a liquid-repellent area is provided, and the chamfered portion C is provided so as to face the liquid-repellent area of the substrate P held on the first holder PH1. Thereby, a substrate holding device which can restrain inflow of the liquid into the back surface side of the substrate is provided.
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Citations
39 Claims
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1. A substrate holding device which holds a substrate to be exposed through a liquid, comprising:
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a holder which holds the substrate; a predetermined surface which faces a side surface of the substrate held on the holder via a predetermined gap and is liquid-repellent; and a chamfered portion formed on an upper portion of the predetermined surface, wherein; the side surface of the substrate is provided with a liquid-repellent area which is liquid-repellent, and the chamfered portion is provided to face the liquid-repellent area of the substrate held on the holder. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15)
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16. An exposure method for exposing a substrate through a liquid, comprising:
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making a side surface of the substrate face a predetermined surface having liquid-repellency via a predetermined gap; and exposing the substrate through the liquid, wherein a chamfered portion is formed on an upper portion of the predetermined surface, and a liquid-repellent area is provided on the side surface of the substrate so as to face the chamfered portion. - View Dependent Claims (17, 18, 19, 20, 21, 22)
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23. A plate member used in an exposure apparatus which exposes a substrate held on a substrate holding device by irradiating a surface of the substrate with an exposure light beam through a liquid, the plate member comprising:
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a predetermined surface which faces a side surface of the substrate held on the substrate holding device via a predetermined gap and which has a liquid-repellency; and a chamfered portion formed on an upper portion of the predetermined surface, wherein the chamfered portion is provided to face a liquid-repellent area on the side surface of the substrate held on the substrate holding device. - View Dependent Claims (24, 25, 26, 27, 28, 29, 30)
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31. A substrate holding device which holds a substrate to be exposed through a liquid, comprising:
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a holder which holds the substrate; and a predetermined surface which faces a side surface of the substrate held on the holder via a gap, wherein the predetermined surface includes a flat portion which is substantially parallel to the side surface of the substrate held on the holder and a chamfered portion which extends to a position above the flat portion, and a sum of a contact angle of the side surface of the substrate with the liquid and a contact angle of the flat portion of the predetermined surface with the liquid is greater than 180 degrees. - View Dependent Claims (32, 33, 34, 35, 36, 37, 38)
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39. A plate member used in an exposure apparatus which exposes a substrate held on a substrate holding device by irradiating an exposure light beam onto a surface of the substrate through a liquid, wherein:
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the plate member has a predetermined surface which faces a side surface of the substrate held on the substrate holding device via a predetermined gap; the predetermined surface includes a flat portion which is substantially parallel to the side surface of the substrate held on the holder and a chamfered portion which extends to a position above the flat portion; and a sum of a contact angle of the side surface of the substrate with the liquid and a contact angle of the flat portion of the predetermined surface with the liquid is greater than 180 degrees.
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Specification