Moveable micro-electromechanical device
First Claim
Patent Images
1. A pixel device, comprising:
- a first plate, a second plate disposed under the first plate wherein the second plate and the first plate include bumps, and a third plate disposed under the second plate;
a first power supply for providing a first voltage to the first plate;
a second power supply for providing a second voltage to the second plate; and
a third power supply for providing a third voltage to the third plate.
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Abstract
A MEMS device is provided. The MEMS device may include a first plate, a second plate and a third plate. The MEMS device may also include a first power supply configured to provide a voltage to the first plate and a second power supply configured apply a voltage to the second plate. In some embodiments, a third power supply may provide a voltage to the third plate.
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Citations
22 Claims
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1. A pixel device, comprising:
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a first plate, a second plate disposed under the first plate wherein the second plate and the first plate include bumps, and a third plate disposed under the second plate; a first power supply for providing a first voltage to the first plate; a second power supply for providing a second voltage to the second plate; and a third power supply for providing a third voltage to the third plate. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16)
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17. A method for operating a pixel device, comprising:
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providing a first plate, a second plate disposed under the first plate wherein the second plate and the first plate include bumps, and a third plate disposed under the second plate; and energizing the first plate, the second plate, and the third plate in a sequence. - View Dependent Claims (18, 19)
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20. A pixel device, comprising:
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a first plate, a second plate disposed under the first plate, wherein the second plate and the first plate include means for preventing shorting, and a third plate disposed under the second plate; first power supply means for providing a first voltage to the first plate; second power supply means for providing a second voltage to the second plate; and third power supply means for providing a third voltage to the third plate. - View Dependent Claims (21, 22)
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Specification